2007
DOI: 10.1016/j.nimb.2007.02.093
|View full text |Cite
|
Sign up to set email alerts
|

Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage

Abstract: Metal-containing tetrahedral amorphous carbon films were produced by dual filtered cathodic vacuum arc plasma sources operated in sequentially pulsed mode.Negatively pulsed bias was applied to the substrate when carbon plasma was generated, whereas it was absent when the molybdenum plasma was present. Film thickness was measured after deposition by profilometry. Glass slides with silver pads were used as substrates for the measurement of the sheet resistance. The microstructure and composition of the films wer… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
22
0

Year Published

2008
2008
2023
2023

Publication Types

Select...
5
2

Relationship

1
6

Authors

Journals

citations
Cited by 29 publications
(22 citation statements)
references
References 13 publications
0
22
0
Order By: Relevance
“…for Zn, Mo and W/ DLC composite lms. 34,35,45 XPS. As indicated by the high-resolution Fe 2p and O 1s spectra in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…for Zn, Mo and W/ DLC composite lms. 34,35,45 XPS. As indicated by the high-resolution Fe 2p and O 1s spectra in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…By comparison silver doping slightly decreased the sp 3 content in hydrogen-free DLC, while for hydrogenated DLC the sp 2 /sp 3 ratio was relatively constant. An explanation for the slight drop in sp 3 content in hydrogen-free DLC is due to its cathodic arc deposition process that the subplantation mechanism [20,21] was suppressed by the presence of silver [13,22]. Also, the silver species may have formed nano-particles that absorbed compressive stress from the DLC matrix to reduce the carbon densification [6]; this effect is more pronounced in hydrogen-free DLC films than hydrogenated DLC films because in hydrogenated DLC films hydrogen fills up much of the empty space of the DLC network and therefore the magnitude of compressive stress was less during deposition.…”
Section: Resultsmentioning
confidence: 99%
“…Another way of producing metal-containing ta-C films is by using a pulsed filtered arc with two cathodes [100,101,102]. The amount of metal in the film can easily be adjusted by selection of the metal to carbon pulse ratio.…”
Section: Hydrogen Nitrogen and Metal-doped Tetrahedral Amorphous Camentioning
confidence: 99%
“…The amount of metal in the film can easily be adjusted by selection of the metal to carbon pulse ratio. An interesting twist in the work [101,102] was that the substrate was biased when carbon ions arrived at the substrate while no bias was applied at the time of metal ion arrival. In this way, the ratio of sp 3 and sp 2 bonds could be affected independently of the concentration of metal.…”
Section: Hydrogen Nitrogen and Metal-doped Tetrahedral Amorphous Camentioning
confidence: 99%