MNM-P6-3 Evaluation of liquid encapsulation in MEMS devices by Bonding in Liquid Technique

Nakahara, Keijiro; Okayama, Yoshiyuki; Miki, Norihisa

doi:10.1299/jsmemnm.2010.2.113

The Proceedings of the Symposium on Micro-Nano Science and Technology

2010

DOI: 10.1299/jsmemnm.2010.2.113

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MNM-P6-3 Evaluation of liquid encapsulation in MEMS devices by Bonding in Liquid Technique

Keijiro Nakahara

Yoshiyuki Okayama

Norihisa Miki

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MNM-P6-3 Evaluation of liquid encapsulation in MEMS devices by Bonding in Liquid Technique

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