Mixed Films Based on MgO for Secondary Electron Emission Application: General Trends and MOCVD Prospects

Vasilyeva, I.G.; Vikulova, E. S.; Pochtar, Alena A.; Morozova, N. B.

doi:10.3390/coatings11020176

Cited by 7 publications

(2 citation statements)

References 63 publications

(132 reference statements)

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“…Chemical vapor deposition is actively involved in science and industry in order to obtain high-quality film materials [1,2]. The process has many varieties, differing in the types of chemical reactions and the conditions for their procedures.…”

Section: Introductionmentioning

confidence: 99%

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

2023

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Scandium complexes with β-diketonate ligands are valuable precursors for the metal–organic chemical vapor deposition (MOCVD) of scandia based materials, but data on their volatilization thermodynamics crucial to MOCVD technology are in a huge disarray. We have addressed this issue with a diagnostic tool based on the principles of group additivity and structure–property relationships, which had been developed by us specifically for metal–organic objects. For this purpose, a mass of experimental data on the vapor pressures and enthalpies of sublimation, vaporization and fusion available in the literature for scandium(III) β-diketonates has been compiled and analyzed. Additionally, saturated vapor pressures and thermodynamic sublimation characteristics have been obtained for scandium(III) complexes with acetylacetone, hexafluoroacetylacetone, and 3-methyl-2,4-pentanedione by transpiration and thermogravimetric methods. New data have allowed us to arbitrate the conflict of literature data. As a result, a consistent set of enthalpies of the three discussed processes has been obtained for eight scandium complexes. Dispersion interactions and non-additive effects have been shown to be typical for metal tris-β-diketonates. They have been taken into account to improve the diagnostic check. It is now possible to quite easily assess the thermodynamics of tris-β-diketonate complexes with different metals which are in demand as precursors in gas-phase technology.

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Section: Introductionmentioning

confidence: 99%

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

2023

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“…Metal acetylacetonates belong to the β-diketonate family and are considered classic precursors for metal-organic chemical vapor deposition (MOCVD) applied to obtain highquality film materials [1][2][3][4][5][6]. Admittedly, the success of film preparation, especially thin and multicomponent ones, is crucially dependent on the thermal properties of the precursors used, which have to provide the essential level of metal-containing vapors fed to the deposition zone, thereby causing the formation of a coating of the desired microstructure, thickness, and composition.…”

Section: Introductionmentioning

confidence: 99%

Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal tris-Acetylacetonates

Makarenko,

Trubin,

Zherikova

2023

Coatings

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Metal acetylacetonates belong to the β-diketonate family and are considered as classics among precursors for metal–organic chemical vapor deposition (MOCVD). The success of film preparation is crucially dependent on the volatilization thermodynamics of the precursors used. Data on the volatilization thermodynamics of metal acetylacetonates are in huge disarray. We amassed and analyzed experimental data on the vapor pressures and on the enthalpies and entropies of fusion, vaporization, and sublimation of acetylacetonate tris-complexes of metals(III) (Al, Sc, Cr, Mn, Fe, Co, Ru, Rh, In, and Ir) available in the literary sources. In addition, saturated vapor pressures over crystalline Al(III), Cr(III), and In(III) acetylacetonates and corresponding thermodynamic sublimation properties were determined. New findings enabled us to arbitrate the conflict among literature data. The enthalpies and entropies of sublimation, vaporization, and fusion were adjusted to the reference temperature for a correct comparison using the empirically estimated differences in heat capacities. The heat capacity of the crystalline phase was shown to depend weakly on the metal atom. As a result, a reliable set of enthalpies and entropies of the mentioned processes of fundamental importance was derived for ten metal complexes. Relationships between volatility and structure were established depending on the central metal. The suggested algorithm can be fairly easily transferred to the acetylacetonate or other β-diketonate isoligand complexes with metals of different valence.

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Sublimation and condensed phase thermodynamics of tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)cerium(IV) as a volatile precursor for ceria-based materials

Makarenko

Struchevskaya

Pishchur

et al. 2022

J Therm Anal Calorim

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Mixed Films Based on MgO for Secondary Electron Emission Application: General Trends and MOCVD Prospects

Cited by 7 publications

References 63 publications

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

Metal-Organic Chemical Vapor Deposition Precursors: Diagnostic Check for Volatilization Thermodynamics of Scandium(III) β-Diketonates

Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal tris-Acetylacetonates

Sublimation and condensed phase thermodynamics of tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)cerium(IV) as a volatile precursor for ceria-based materials

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