Mixed analog—digital highly sensitive sensor interface circuit for low-cost microsensors

Burstein, A.; Kaiser, William J.

doi:10.1016/0924-4247(96)80148-8

Cited by 17 publications

(17 citation statements)

References 3 publications

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“…These measurements confirm both the power supply stability and the low noise levels, and therefore the power supply noise can be neglected as compared to the mechanicalthermal noise of the MEMS device. A single-ended output circuit [19] has been used to measure the displacement of the fabricated MEMS device. The capacitance is measured by driving both terminals of the capacitive bridge and taking the centre node as the output terminal (common to both capacitors).…”

Section: Measurement Setupmentioning

confidence: 99%

Measuring and interpreting the mechanical–thermal noise spectrum in a MEMS

Rocha

Cretu

Wolffenbuttel

2005

J. Micromech. Microeng.

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The meta-stability of the pull-in displacement of an electrostatically operated parallel plate micromechanical structure is used for the capacitive measurement of the mechanical-thermal noise spectrum in a MEMS. Pull-in time depends on force and is not affected by the input-referred noise of the readout circuit. Repeatedly bringing the microstructure to pull-in while measuring the pull-in time followed by FFT enables the measurement of the mechanical noise spectrum with a non-mechanical noise level set primarily by the resolution of the time measurement. The white noise level is found to be in agreement with the theory on damping. The 1/f noise spectrum is found to be independent of ambient gas pressure with a 1/f noise-white noise cross-over frequency at 0.007 Hz for a 1 bar gas pressure and is reproducible for devices fabricated in the same process and the same run.

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Section: Measurement Setupmentioning

confidence: 99%

Measuring and interpreting the mechanical–thermal noise spectrum in a MEMS

Rocha

Cretu

Wolffenbuttel

2005

J. Micromech. Microeng.

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“…degrading the output characteristics (8) (9) . In the following sections, we describe a method of minimizing the offset errors, and the static and dynamic response on the modified self-balancing (charge balanced) circuit consisting of reduced active and passive electrical elements compared to a circuit already reported (4) .…”

Section: Introductionmentioning

confidence: 99%

“…For example, the capacitance AC bridge based on the well-known concept of transformer-ratio-arm bridge (1) (8) in principle, has an output proportional to the displacement, however, it is not immune to C in and C p2 . It also needs a large load resistance to stabilize the DC offset, occupying a large die area for the circuit.…”

Section: Introductionmentioning

confidence: 99%

A Charge Balanced C-V Converter for a Differential Capacitance Sensor

et al. 2003

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This paper presents a simple new configuration for a switched capacitor type C-V converter based on a charge balance principle for a differential capacitance sensor and its simulation results. The new converter was devised and realized using only one operational amplifier, nine CMOS switches and an oscillation circuit. It was shown that the offset output due to the input offset voltage of an operational amplifier can be ideally reduced to zero with an appropriate additional switch configuration.By using a P-Spice circuit simulator, the offset cancellation scheme and proper transient response were confirmed for possible parasitic capacitances concerned in a typical differential capacitance sensor. In addition, a P-Spice system simulation based on analog behavioral models enabled us to reliably estimate the operation of an electro-mechanical system with the C-V converter statically and dynamically, where the electrostatic force acting on a movable electrode was taken into account.

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“…In general, emphasis in this field has been placed on developing new signal processing systems [4,5] and sensor interfaces [4,6,7] in order to increase the accuracy of capacitance measurement. Nearly all of the existing applications are based on planar or cylindrical metallic electrodes.…”

Section: Introductionmentioning

confidence: 99%

Mesoporous gold electrodes for sensors based on electrochemical double layer capacitance

Mortari

Maaroof

Martin

et al. 2007

Sensors and Actuators B: Chemical

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The use of mesoporous gold as electrode material for measurement of electrochemical capacitance is investigated. The electrodes possess a pore size in the range of 10 to 30 nm and are prepared by de-alloying films of AuAl x , where x≥2. Analyses conducted with X-ray photoelectron spectra (XPS) show that their surfaces are essentially pure gold, with only traces of aluminium remaining. The electrodes show near-ideal capacitor behaviour under both cyclic voltammetry and potential-step conditions. The higher capacitance of the mesoporous electrodes leads to a better dynamic range in potential-step experiments, resulting in improved accuracy of measurement. The sensitivity of the new material as a capacitive sensor is demonstrated in a milk fouling experiment, and is improved by up to 30 times compared to the control sample of ordinary planar gold. We propose that the use of mesoporous gold electrodes offer a convenient way to sensitively and accurately amplify the capacitance signal of an electrochemical sensor.

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Mixed analog—digital highly sensitive sensor interface circuit for low-cost microsensors

Cited by 17 publications

References 3 publications

Measuring and interpreting the mechanical–thermal noise spectrum in a MEMS

Measuring and interpreting the mechanical–thermal noise spectrum in a MEMS

A Charge Balanced C-V Converter for a Differential Capacitance Sensor

Mesoporous gold electrodes for sensors based on electrochemical double layer capacitance

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