Mist CVD of vanadium dioxide thin films with excellent thermochromic properties using a water-based precursor solution

Matamura, Yuya; Ikenoue, Takumi; Miyake, Masao; Hirato, Tetsuji

doi:10.1016/j.solmat.2021.111287

Cited by 14 publications

(8 citation statements)

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“…Although introducing surfactants or soluble polymers as dispersing agents would help, their removal in the following steps would lead to the destruction of VO 2 or the film structure. To date, mist-assisted chemical deposition of functional thin films has been developed for ZnO, In 2 O 3 , and SnO 2 films used in solar cells, sensors, transistors, etc. − For the mist chemical deposition system, it is a challenge to prepare VO 2 films with phase purity . To overcome this challenge, NC-containing mist-deposition is a newly developed technique and has been applied to prepare the GZO film .…”

Section: Resultsmentioning

confidence: 99%

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UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

Zhu

et al. 2022

ACS Omega

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As a narrow band semiconductor at room temperature and a metallic material above ∼68 °C, functional VO2 films are widely investigated for smart windows, whereas their potential for ultraviolet–visible–infrared (UV–vis–IR) broad spectral photodetectors has not been efficiently studied. In this report, photodetectors based on VO2–ZnO nanocrystal composite films were prepared by nanocrystal-mist (NC-mist) deposition. An enhanced photodetection switching ratio was achieved covering the ultraviolet to infrared wavelength. Due to the synergetic effect of nanosize, surface, phase transition, percolation threshold, and the band structure of the heterojunction, the transfer and transport of photogenerated carriers modulate the device performance. This study probes new chances of applying VO2-semiconductor-based nanocomposites for broad spectral photodetectors.

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Section: Resultsmentioning

confidence: 99%

“… 40 − 43 For the mist chemical deposition system, it is a challenge to prepare VO 2 films with phase purity. 44 To overcome this challenge, NC-containing mist-deposition is a newly developed technique and has been applied to prepare the GZO film. 45 Here, we use this method to prepare the VO 2 –ZnO film.…”

Section: Resultsmentioning

confidence: 99%

UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

Zhu

et al. 2022

ACS Omega

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“…A custom-built hot-wall mist CVD system was used for the deposition of V 2 O 3 films. The apparatus and procedure for mist CVD in this study were the same as those described in our previous report . The mist CVD was performed by supplying the precursor mist through N 2 at a flow rate of 6.0 L min –1 to the substrate heated to a predetermined temperature (450–650 °C) for 10 min.…”

Section: Methodsmentioning

confidence: 99%

“…The apparatus and procedure for mist CVD in this study were the same as those described in our previous report. 30 The mist CVD was performed by supplying the precursor mist through N 2 at a flow rate of 6.0 L min −1 to the substrate heated to a predetermined temperature (450−650 °C) for 10 min. After the mist supply was turned off, the substrate was cooled to <100 °C in a furnace under the flow of N 2 gas.…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

Formation of Uniquely Oriented VO₂ Thin Films by Topotactic Oxidation of V₂O₃ Epitaxial Films on R-Plane Al₂O₃

Matamura

Kimura

Ikenoue

et al. 2022

Crystal Growth & Design

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Highly oriented VO 2 films are promising candidates for next-generation electronic and optical devices owing to their near-room temperature metal−insulator transition (MIT) (approximately 67 °C). Oriented VO 2 films can be prepared by the topotactic oxidation of V 2 O 3 epitaxial films. However, the detailed mechanism that determines the orientation of the VO 2 films thus formed remains unclear. Herein, we report the fabrication of VO 2 thin films with unique orientation via the topotactic oxidation of a V 2 O 3 epitaxial film on an R-plane Al 2 O 3 substrate and propose a mechanism for the topotactic oxidation of V 2 O 3 . The VO 2 film had a unique orientation, where the (23̅ 1̅ ) and (231̅ ) planes were almost parallel to the substrate surface but tilted by a few degrees. The crystallographic analysis of V 2 O 3 and VO 2 explained this peculiar orientation and further revealed that the substrate affected the orientation of VO 2 during the topotactic oxidation. The obtained VO 2 film showed a change of more than four orders of magnitude in electrical resistance across the MIT. This demonstrates the applicability of topotactic oxidation to prepare high-quality VO 2 films. This work deepens the understanding of topotactic oxidation for the fabrication of oxide films with well-controlled orientations.

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“…12a; T lum and ΔT sol of the film are 48.1% and 5.2%, respectively, better than that obtained from some other methods such as solution processes and atmospheric pressure process. 155 The improvement in optical properties is attributed to the solvent change, i.e., the replacement of an ethanol-based precursor with an aqueous-based precursor; the water vapor atmosphere in the deposition chamber helps to stabilize vanadium in the tetravalent state. Annealing treatment can significantly enhance the MIT characteristics of epitaxial-VO 2 films (MOCVD).…”

Section: Nanoscale Reviewmentioning

confidence: 99%

Element doping: a marvelous strategy for pioneering the smart applications of VO₂

Xue

Yin

2022

Nanoscale

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Mist CVD of vanadium dioxide thin films with excellent thermochromic properties using a water-based precursor solution

Cited by 14 publications

References 94 publications

UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

Formation of Uniquely Oriented VO₂ Thin Films by Topotactic Oxidation of V₂O₃ Epitaxial Films on R-Plane Al₂O₃

Element doping: a marvelous strategy for pioneering the smart applications of VO₂

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Mist CVD of vanadium dioxide thin films with excellent thermochromic properties using a water-based precursor solution

Cited by 14 publications

References 94 publications

UV–vis–IR Broad Spectral Photodetectors Based on VO2–ZnO Nanocrystal Films

UV–vis–IR Broad Spectral Photodetectors Based on VO2–ZnO Nanocrystal Films

Formation of Uniquely Oriented VO2 Thin Films by Topotactic Oxidation of V2O3 Epitaxial Films on R-Plane Al2O3

Element doping: a marvelous strategy for pioneering the smart applications of VO2

Contact Info

Product

Resources

About

UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

UV–vis–IR Broad Spectral Photodetectors Based on VO₂–ZnO Nanocrystal Films

Formation of Uniquely Oriented VO₂ Thin Films by Topotactic Oxidation of V₂O₃ Epitaxial Films on R-Plane Al₂O₃

Element doping: a marvelous strategy for pioneering the smart applications of VO₂