Misalignment Analysis of Cylindrical Inner Surfaces in Interferometric Measurement

Fast separation method of misalignment errors for cylindrical full-surface interferometry

“…Sun Hao from Changchun University of Science and Technology analyzed the misalignment error between a right angle cone and the inner cylindrical surface to be measured by taking the inner cylindrical surface as the measurement object. He classified the misalignment error into three types, namely, shift, rotate (also known as tilt), and top-angle error, and made calculations and simulations on the distribution of error interferometric light intensity caused by each of the misalignment errors [9,10]. Huimin Gao from Tianjin University and Shuai Xu from Suzhou University of Science and Technology have analyzed the misalignment errors of cones and cylinders based on their respective research objects, but there is a significant deviation in the calculation results between them [11].…”