Mirror design for piezo-driven mechanical devices: Modeling and simulations

Lee, Jeongick

doi:10.1007/s12541-012-0189-x

Cited by 5 publications

(1 citation statement)

References 10 publications

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“…This hybrid structure is also applied for different geometries. Some examples of piezoelectric actuators for precise applications are as follows: microactuators (see [ 7 ]), ultrasonic motors (see [ 8 ]), active vibration control (see [ 9 ]), path length controller (PLC) of laser systems (see [ 10 , 11 ]), dither mechanism of ring laser gyroscopes (RLGs) (see [ 12 ]), low force sample holders (see [ 13 , 14 ]), accelerometers and constant frequency vibration sources.…”

Section: Introductionmentioning

confidence: 99%

Computational–Experimental Design Framework for Laser Path Length Controller

Fenercioğlu

Yalçınkaya

2021

Sensors

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The application areas of piezoelectric materials are expanding rapidly in the form of piezo harvesters, sensors and actuators. A path length controller is a high-precision piezoelectric actuator used in laser oscillators, especially in ring laser gyroscopes. A path length controller alters the position of a mirror nanometrically by means of a control voltage to stabilize the route that a laser beam travels in an integral multiple of laser wavelength. The design and verification of a path length controller performance requires long (up to 3 months), expensive and precise production steps to be successfully terminated. In this study, a combined computational–experimental design framework was developed to control, optimize and verify the performance of the path length controller, without the need for ring laser gyroscope assembly. A novel framework was structured such that the piezoelectric performance characteristics were calculated using finite element analysis. Then, a stand-alone measurement system was developed to verify the finite element analysis results before system integration. The final performance of the novel framework was verified by a direct measurement method called mode-scanning, which is founded on laser interferometry. The study is concluded with the explanation of measurement errors and finite element correlations.

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