We report on electron beam induced current and current-voltage (I -V) measurements on Schottky diodes on p-type doped GaN layers grown by metal organic chemical vapor deposition. A Schottky barrier height of 0.9 eV was measured for the Ti/Au Schottky contact from the I -V data. A minority carrier diffusion length for electrons of (0.2Ϯ0.05) m was measured for the first time in GaN. This diffusion length corresponds to an electron lifetime of approximately 0.1 ns. We attempted to correlate the measured electron diffusion length and lifetime with several possible recombination mechanisms in GaN and establish connection with electronic and structural properties of GaN. © 1998 American Institute of Physics. ͓S0003-6951͑98͒03848-0͔The wide band gap semiconductors GaN and AlGaN are already established materials for light emitting diodes and lasers, 1 and have recently attracted a lot of interest for applications in high power and high temperature electronics. 2 Some of the most significant parameters influencing the design and performance of both unipolar and bipolar high power devices are the critical field for electric breakdown and the transport parameters, such as minority carrier diffusion lengths and lifetimes, for both holes and electrons. Correlation of these parameters with material properties is important for succesful development of power electronics systems based on the nitrides. Minority carrier diffusion lengths and lifetimes are critical parameters for the performance of thyristor switches and other bipolar devices. 3,4 Larger hole lifetimes in the n-type standoff layer of thyristors lead to smaller ON-state voltages and therefore smaller power dissipation and larger maximum current densities. 3,4 The electron diffusion length is important because it determines the range of suitable thicknesses for the p-type injection layer in bipolar structures. In this study we report a measurement of the electron diffusion length and estimate the electron lifetime as a minority carrier in GaN.We fabricated Schottky diodes on Mg-doped GaN/ sapphire layers grown by metal organic chemical vapor deposition ͑MOCVD͒. The experiments were performed on samples from two commercial vendors. For both samples the hole concentration measured by Hall measurements was approximately (1 -4)ϫ10 17 cm Ϫ3 , and the hole mobility was approximately 5 cm 2 /V s. Prior to metal deposition, the GaN surfaces were cleaned with organic solvents, dipped in HF:H 2 O ͑1:10͒, rinsed in deionized water, then blown dry with nitrogen gas. Contact metals were sputtered in a chamber with background pressure of 2ϫ10 Ϫ8 Torr and patterned to produce Schottky contacts as well as large-area ohmic contacts. A Ni/Au ͑200 Å/1500 Å͒ metallization scheme was used for the ohmic contacts, while Ti/Au was used for the Schottky contacts.Current-voltage characteristics were measured at room temperature with an HP 4156 parameter analyzer and are shown in Fig. 1. From these measurements we obtained a barrier height of ⌽ Bp ϭ0.9 eV. Since the reported barrier heigh...