Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters

Madinei, Hadi; Khodaparast, Hamed Haddad; Friswell, Michael I.; Adhikari, Sondipon

doi:10.1016/j.energy.2018.02.048

Cited by 16 publications

(8 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the past few years many researchers have focused on the dynamics of energy harvesting devices so that to enhance the efficiency of the energy harvester [1][2][3]. Among the numerous publications reported so far, some of them have focused on harvesting energy based on electromagnetic effect [4][5][6][7][8][9], some have focused on piezoelectric based ones [1,2,[10][11][12][13][14]. Capacitive energy harvesting devices have also been focused in the literature thanks to their ease of fabrication; however, as a major challenge, they require a voltage source to induce electric charges on the electrodes of the variable capacitor and consequently, start the conversion [3,[15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Bifurcation Analysis and Nonlinear Dynamics of a Capacitive Energy Harvester in the Vicinity of the Primary and Secondary Resonances

Azizi

Madinei

Taghipour

et al. 2021

Preprint

Self Cite

View full text Add to dashboard Cite

The impetus of the present study is to examine the effect of nonlinearity on the efficiency enhancement of a capacitive energy harvester. The model consists of a cantilever microbeam underneath which there is an electret layer with a surface voltage, which is responsible for the driving energy. The packaged device is exposed to unwanted harmonic mechanical excitation. The microbeam undergoes mechanical vibration and accordingly the energy is harvested throughout the output circuit. The dynamic formulation accounts for nonlinear curvature, inertia, and nonlinear electrostatic force. The efficiency of the device in the vicinity of the primary and super-harmonic resonances is examined and accordingly the output power is evaluated. Bifurcation analysis is carried out on the dynamics of the system by detecting the bifurcations in the frequency domain and diagnosing their types. One of the challenging issues in the design and analysis of energy harvesting devices is to broaden the bandwidth so that more frequencies are accommodated within the amplification region. In this study the effect of the nonlinearity on the bandwidth broadening, as well as efficiency improvement of the device, is studied.

show abstract

Section: Introductionmentioning

confidence: 99%

Bifurcation Analysis and Nonlinear Dynamics of a Capacitive Energy Harvester in the Vicinity of the Primary and Secondary Resonances

Azizi

Madinei

Taghipour

et al. 2021

Preprint

Self Cite

View full text Add to dashboard Cite

show abstract

“…One approach to overcome this challenge is to design an adaptive system. To this end, Madinei et al [25,26] performed a preliminary study of a micro energy harvester with parallel piezo layers benefiting from tuning via an electrostatic actuator. A solution to improve energy harvesting under wide-spectrum vibration is to create a bistable system oscillating between the two stable states.…”

Section: Introductionmentioning

confidence: 99%

Design, analysis, and feedback control of a nonlinear micro-piezoelectric–electrostatic energy harvester

Lajimi

Friswell

2020

Nonlinear Dyn

View full text Add to dashboard Cite

A nonlinear micro piezoelectric-electrostatic energy harvester is designed and studied using mathematical and computational methods. The system consists of a cantilever beam substrate, a bimorph piezoelectric transducer, a pair of tuning parallel-plate capacitors, and a tip-mass. The governing nonlinear mathematical model of the electro-mechanical system including nonlinear material and quadratic air-damping is derived for the series connection of the piezoelectric layers. The static and modal frequency curves are computed to optimize the operating point, and a parametric study is performed using numerical methods. A bias DC voltage is used to adapt the system to resonate with respect to the frequency of external vibration. Furthermore, to improve the bandwidth and performance of the harvester (and achieve a high level of harvested power without sacrificing the bandwidth) a nonlinear feedback loop is integrated into the design.

show abstract

“…Micro-electro-mechanical systems (MEMSs) are smaller in size in comparison with traditional mechatronic systems. They are widely used in medicine, military fields, and our daily life [1][2][3]. They have high requirements in parts, not only small size but also complex microstructures [4,5].…”

Section: Introductionmentioning

confidence: 99%

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

Wang

Zhang

et al. 2020

Micromachines

View full text Add to dashboard Cite

This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS.

show abstract

Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters

Cited by 16 publications

References 21 publications

Bifurcation Analysis and Nonlinear Dynamics of a Capacitive Energy Harvester in the Vicinity of the Primary and Secondary Resonances

Bifurcation Analysis and Nonlinear Dynamics of a Capacitive Energy Harvester in the Vicinity of the Primary and Secondary Resonances

Design, analysis, and feedback control of a nonlinear micro-piezoelectric–electrostatic energy harvester

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

Contact Info

Product

Resources

About