Miniaturized VHF quartz MEMs resonator design methodology

Kirby, D. J.; Kubena, R. L.; Yong, Yook‐Kong; Stratton, F. P.; Nguyen, Hung D.; Joyce, R. J.; Chang, David T.; Garstecki, Jeffrey F.

doi:10.1109/fcs.2017.8088845

2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC) 2017

DOI: 10.1109/fcs.2017.8088845

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Miniaturized VHF quartz MEMs resonator design methodology

D. J. Kirby

R. L. Kubena

Yook‐Kong Yong

et al.

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Miniaturized VHF quartz MEMs resonator design methodology

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