Miniaturized Laser Power Sensor via Rapid Phototyping

Abstract

This work presents a photolithographic rapid prototyping process for producing thin films ("Rapid Phototyping"). This process allows a quick and cost-effective generation of scalable thermopile microstructures using commercial equipment and materials. Structural widths of 100x250μm can be produced reproducible in a lift-off process with an accuracy of 5 microns vertically and 30 microns horizontally.