2010
DOI: 10.1364/oe.18.014245
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Miniaturized fiber taper reflective interferometer for high temperature measurement

Abstract: We present an ultra-small all-silica high temperature sensor based on a reflective Fabry-Perot modal interferometer (FPMI). Our FPMI is made of a micro-cavity (approximately 4.4 microm) directly fabricated into a fiber taper probe less than 10 mum in diameter. Its sensing head is a miniaturized single mode-multimode fiber configuration without splicing. The sensing mechanism of FPMI is the interference among reflected fundamental mode and excited high-order modes at the end-faces. Its temperature sensitivity i… Show more

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Cited by 170 publications
(129 citation statements)
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“…Microscope image of a typical TFT, five photographs separated by four dashed vertical lines are used to show the whole profile of the TFT. The black arrow indicates the milling location (Kou et al, 2010b). Reprinted with permission.…”
Section: Fabrication and Measurementmentioning
confidence: 99%
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“…Microscope image of a typical TFT, five photographs separated by four dashed vertical lines are used to show the whole profile of the TFT. The black arrow indicates the milling location (Kou et al, 2010b). Reprinted with permission.…”
Section: Fabrication and Measurementmentioning
confidence: 99%
“…Thus the micromachining accuracy is limited and the size of the microcavity is large (tens of micrometers). The latest progress in FIB technique opens a new widow of opportunity for ultra-small size cavity (Kou et al, 2010a(Kou et al, , 2010b. Microcavities with nanometer-scale accuracy in a subwavelength microfiber could be fabricated by FIB, which is relatively difficult for fs laser approach.…”
Section: Fib Machined Micro-cavity Tft Interferometersmentioning
confidence: 99%
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