1997
DOI: 10.1016/s0013-4686(97)00172-2
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Miniaturization of potentiometric sensors using porous silicon microtechnology

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Cited by 83 publications
(25 citation statements)
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“…Nano-size silicon-based structures have attracted a lot of interest in the current miniaturization trend toward nanophotonics and nanoelectronics (e.g., [1][2][3][4][5]). Particularly, the understanding of material properties changing with size, composition, and charge plays an important role.…”
Section: Introductionmentioning
confidence: 99%
“…Nano-size silicon-based structures have attracted a lot of interest in the current miniaturization trend toward nanophotonics and nanoelectronics (e.g., [1][2][3][4][5]). Particularly, the understanding of material properties changing with size, composition, and charge plays an important role.…”
Section: Introductionmentioning
confidence: 99%
“…5(f). The pH sensitivity increased with an increase in the surface area of the AAO membrane due to the increasing capacitance value of the measuring signal [13]. sensitivity, the hysteresis properties of the AAO membrane worsened slightly with an increase in pore-widening time.…”
Section: Methodsmentioning
confidence: 99%
“…Такой же принцип относительно изме-рения изменений емкости был использован и при разработке сенсора для определения спир-та в парах воздуха [53]. Созданы потенциомет-рические биосенсоры, основанные на измере-нии кривых емкость-напряжение [54][55][56]. ПК в данном случае используют в качестве матрик-са для иммобилизации фермента пеницинила-зы.…”
Section: пористый кремний и сенсорные устройстваunclassified