Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

Schöning, Michael J.; Näther, Niko; Auger, V.; Poghossian, Arshak; Koudelka‐Hep, M.

doi:10.1016/j.snb.2004.12.029

Cited by 52 publications

(37 citation statements)

References 13 publications

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“…-the EIS sensor can be integrated as a separate component into a home-made flow-through cell; here, pH-sensitive and penicillinase-modified Ta 2 O 5 -gate EIS sensors have been integrated into a flow-through cell with a variable internal volume from 12 to 48 mL and combined with a commercial FIA system [31,32]; -the second platform represents a monolithic wafer-level integration of the flow channel together with the sensor structure; here, the sensor is an integral part of the whole flow-through microcell that has been realized by combining Si and SU-8 technologies [32,39]; this approach allows to extend the functional possibilities of the microcell by means of additional thin-film Pt microelectrodes, which can be also utilized for amperometric measurements or serve as a H þ -or OH --ion generator in flow-velocity measurements.…”

Section: Enzyme-modified Fedsmentioning

confidence: 99%

Bio FEDs (Field‐Effect Devices): State‐of‐the‐Art and New Directions

2006

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This paper gives a brief survey on biologically sensitive FEDs (field-effect devices) and introduces some recent approaches in this field. Basic concepts, functional principles and current trends in research and development for namely, ISFETs (ion-sensitive field-effect transistors), capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable potentiometric sensor) structures will be presented.

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Section: Enzyme-modified Fedsmentioning

confidence: 99%

Bio FEDs (Field‐Effect Devices): State‐of‐the‐Art and New Directions

2006

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“…Such EIS sensors are simple in layout, easy and low-cost in fabrication (usually no photolithographic process steps and complicated encapsulation procedures are required). In previous experiments, EIS sensors have been applied for the detection of pH [16], ion concentration [17,18], enzymatic reactions [19,20] and enzyme-logic gates [21], charged macromolecules [22] and nanoparticles [23]. In general, the functioning mechanism of field-effect (bio-)chemical sensors is based on the effect of charge or potential changes at the interface electrolyte/gate insulator induced by the particular analyte.…”

Section: Introductionmentioning

confidence: 99%

Degradation of thin poly(lactic acid) films: Characterization by capacitance–voltage, atomic force microscopy, scanning electron microscopy and contact-angle measurements

Schusser¹,

Menzel²,

Bäcker³

et al. 2013

Electrochimica Acta

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a b s t r a c tFor the development of new biopolymers and implantable biomedical devices with predicted biodegradability, simple, non-destructive, fast and inexpensive techniques capable for real-time in situ testing of the degradation kinetics of polymers are highly appreciated. In this work, a capacitive field-effect electrolyte-insulator-semiconductor (EIS) sensor has been applied for real-time in situ monitoring of degradation of thin poly(d,l-lactic acid) (PDLLA) films over a long-time period of one month. Generally, the polymer-modified EIS (PMEIS) sensor is capable of detecting any changes in the bulk, surface and interface properties of the polymer (e.g., thickness, coverage, dielectric constant, surface potential) induced by degradation processes. The time-dependent capacitance-voltage (C-V) characteristics of PMEIS structures were used as an indicator of the polymer degradation. To accelerate the PDLLA degradation, experiments were performed in alkaline buffer solution of pH 10.6. The results of these degradation measurements with the EIS sensor were verified by the detection of lactic acid (product of the PDLLA degradation) in the degradation medium. In addition, the micro-structural and morphological changes of the polymer surface induced by the polymer degradation have been systematically studied by means of scanning-electron microscopy, atomic-force microscopy, optical microscopy, and contact-angle measurements.

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“…These values are comparable with data discussed in literature. [30][31][32] The average hysteresis in the concentration range between pH 6 and pH 8 was about 2.4 mV, which corresponds to a failure in pH measurement of about 0.04 pH.…”

Section: Physical and Electrochemical Characterizationmentioning

confidence: 99%

Development of a Combined pH‐ and Redox‐Sensitive Bi‐Electrode Glass Thin‐Film Sensor

Iken

Bronder

Goretzki

et al. 2019

Physica Status Solidi (a)

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In this work, a combined pH‐ and redox‐sensitive bi‐electrode glass thin‐film sensor is developed for the simultaneous detection of pH and redox potential in aqueous solutions. Therefore, the pH‐ and redox‐sensitive glass bulk materials are prepared first by glass‐pouring processes and tailored regarding the sensing properties as well as the deposition suitability. A layout for the bi‐electrode transducer structure (sensor chip) is developed is been fabricated on a glass substrate via conventional thin‐film techniques. The sensitive glass bulk materials are transferred on the bi‐electrode structures by means of pulsed laser deposition technique (PLD). The fabricated sensors are physically and electrochemically characterized by means of scanning electron microscopy (SEM), Rutherford backscattering spectrometry (RBS), profilometry, impedance‐ and potentiometric measurements. The fabricated sensor structures are successfully tested in the range pH 5–9 and the redox potential in different solutions including also real test samples of soda and pool water.

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Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

Cited by 52 publications

References 13 publications

Bio FEDs (Field‐Effect Devices): State‐of‐the‐Art and New Directions

Bio FEDs (Field‐Effect Devices): State‐of‐the‐Art and New Directions

Degradation of thin poly(lactic acid) films: Characterization by capacitance–voltage, atomic force microscopy, scanning electron microscopy and contact-angle measurements

Development of a Combined pH‐ and Redox‐Sensitive Bi‐Electrode Glass Thin‐Film Sensor

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