Miniature low-pass mechanical filter for improved frequency response with MEMS microphones &amp; low-pressure transducers

Hurst, Adam M.; Goodman, Scott; Hilton, John P.; VanDeWeert, Joe

doi:10.1016/j.sna.2014.01.039

Cited by 7 publications

(2 citation statements)

References 19 publications

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“…In fact, this technique permits to avoid not only the use of attachment arms, which implies the existence of apertures around, but also holes which should serve for etching the sacrificial layers. In practical terms, the existence of openings around the diaphragm can lead to an acoustic short path in the dynamic range, especially in the vicinity of low frequencies, between the surrounding air above and the cavity underneath the diaphragm (Hurst et al., 2014). This acoustic short path occurs given that any modification in the pressure of the ambient air will propagate rapidly into the cavity under the sensing diaphragm through openings around arms and/or etching holes (Jusoé, 2013).…”

Section: Mechanical Modeling Of the Structurementioning

confidence: 99%

A MEMS-based shifted membrane electrodynamic microsensor for microphone applications

Said

Tounsi

Surya

et al. 2016

Journal of Vibration and Control

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In this paper we present a multidisciplinary modeling of a MEMS-based electrodynamic microsensor, when an additional vertical offset is defined, aiming acoustic applications field. The principle is based on the use of two planar inductors, fixed outer and suspended inner. When a DC current is made to flow through the outer inductor, a magnetic field is produced within the suspended inner one, located on a membrane top. In our modeling, the magnetic field curve, as a function of the vertical fluctuation magnitude, shows that the radial component was maximum and stationary for a specific vertical location. We demonstrate in this paper that the dynamic response of the electrodynamic microsensor was very appropriate for acting as a microphone when the membrane is shifted to a certain vertical position, which represents an improvement of the microsensor's basic design. Thus, a proposed technological method to ensure this offset of the inner inductor, by using wafer bonding method, is discussed. On this basis, the mechanical and electrical modeling for the new microphone design was performed using both analytic and Finite Element Method. Firstly, the resonance frequency was set around 1.6 kHz, in the middle of the acoustic band (20 Hz -20 kHz), then the optimal location of the inner average spiral was evaluated to be around 200mm away from the diaphragm edge. The overall dynamic sensitivity was evaluated by coupling the lumped elements from different domains interfering during the microphone function. Dynamic sensitivity was found to be 6.3 V/Pa when using 100 mm for both gap and vertical offset. In conclusion, a bandwidth of 37.6 Hz to 26.5 kHz has been found which is wider compared to some conventional microphones.

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Section: Mechanical Modeling Of the Structurementioning

confidence: 99%

A MEMS-based shifted membrane electrodynamic microsensor for microphone applications

Said

Tounsi

Surya

et al. 2016

Journal of Vibration and Control

View full text Add to dashboard Cite

show abstract

“…Furthermore, the applications of the active filters will also be discussed, to emphasize how this can affect certain situations. A look at the hands-on approach will allow teaching one how to utilize these functions and apply the information in the possible projects one may do [3,4,5].…”

Section: Introductionmentioning

confidence: 99%

Frequency Response modeling of Active Filters

Don¹

2020

IJATCSE

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It is expected from this paper that Active filters will be discussed in detail and strengthened with examples. There will be explanations on the different types of this filter, and also the different passes, which will show what the signal will or will not have. The concept and theory behind the filters will also be discussed, as to give a proper introduction to filters. Data concerning the differences among these types will be evidence to prove and demonstrate how the filters can affect the signal in different situations. Lastly, the paper will explain how a filter is used and how it works. The numerous applications behind filters and how they affect signals will show how important they can be to clean and remove unnecessary parts of said signal. Hence, the paper will be separated in a certain way, with the initial half explaining the general information behind it, and the second half explaining in further detail and giving some data to enhance the envision of the filter.

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Instruments for Identification of Corona Discharge Presence by Spectral Characteristics of Acoustic Radiation

Zaporozhets,

Babak,

Starenkiy

et al. 2023

Studies in Systems, Decision and Control

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Miniature low-pass mechanical filter for improved frequency response with MEMS microphones & low-pressure transducers

Cited by 7 publications

References 19 publications

A MEMS-based shifted membrane electrodynamic microsensor for microphone applications

A MEMS-based shifted membrane electrodynamic microsensor for microphone applications

Frequency Response modeling of Active Filters

Instruments for Identification of Corona Discharge Presence by Spectral Characteristics of Acoustic Radiation

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