MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions

Huang, Weicai; Yang, Kaiming; Zhu, Yu

doi:10.1007/978-3-030-89098-8_34

Cited by 1 publication

(1 citation statement)

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“…To increase the throughput, the precision motion stage in lithography machine has to operate at high speed and high acceleration, which requires a lower moving mass or larger driven force (Boeren et al, 2020;Kuang et al, 2020;Huang et al, 2021;Voorhoeve et al, 2021;Kuang et al, 2022). Voice coil motor is widely used in nano-accuracy motion stages because of its advantages in high force linearity and low stiffness as contactless direct actuators (Song et al, 2018;Li L. et al, 2019;Liu et al, 2020;Song et al, 2022).…”

Section: Introductionmentioning

confidence: 99%

Precision Flux Control of Linear Reluctance Actuator Using the Integral Sliding Mode Method

2022

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The performance of the actuator is becoming increasingly important in the ultra-precision stage. However, the traditional Lorentz motors with given mechanical parameters cannot provide enough force for the next-generation motion stage in the semiconductor industry since they achieve a physical limit of power factor. To tackle this problem, this study develops a novel-driven approach and its control strategy for high-dynamic stages. Explicitly, the proposed method utilizes a linear reluctance motor as an actuator, which could promote the continuous thrust significantly. A heuristic optimization-based Bouc–Wen model is established to describe the nonlinear behavior of the novel actuator. Also, a flux control algorithm based on the integral sliding mode is derived and adjusted for precision thrust generation. Comparative simulations on a specific linear reluctance motor confirm the effectiveness and superiority of the proposed method and show that it has the ability to conquer the force nonlinearity of the novel actuator.

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