Milling of polymeric photonic crystals by focused ion beam

Pialat, E.; Trigaud, Thierry; Bernical, Virginie; Moliton, Jean-Pierre

doi:10.1016/j.msec.2005.07.017

Cited by 12 publications

(11 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Sub-100 nm patterns formed by EBL usually have low aspect ratios and Gaussian sidewall profiles and this makes the subsequent bonding/assembly process difficult. FIB milling directly into polymers for nanostructure fabrication is still at a very early stage of development due to: 182,183 (1) chemical changes induced in the polymer after direct milling arising from interactions with the impinging high energy ions; (2) charge build-up due to the insulating nature of the polymers; and (3) localized heating due to the low thermal conductivity of the material. Therefore, rather than direct patterning into polymer substrates, EBL and FIB have been used as a means of defining nanostructures in a thin resist layer, which are then transferred to an underlying hard substrate, such as Si or quartz-based nanofluidic chips, 154,184 or for imprint stamps containing nanofluidic structures.…”

Section: Fabrication Of Nanochannels and Nanoslits In Polymersmentioning

confidence: 99%

Flexible fabrication and applications of polymer nanochannels and nanoslits

et al. 2011

View full text Add to dashboard Cite

Fluidic devices that employ nanoscale structures (<100 nm in one or two dimensions, slits or channels, respectively) are generating great interest due to the unique properties afforded by this size domain compared to their micro-scale counterparts. Examples of interesting nanoscale phenomena include the ability to preconcentrate ionic species at extremely high levels due to ion selective migration, unique molecular separation modalities, confined environments to allow biopolymer stretching and elongation and solid-phase bioreactions that are not constrained by mass transport artifacts. Indeed, many examples in the literature have demonstrated these unique opportunities, although predominately using glass, fused silica or silicon as the substrate material. Polymer microfluidics has established itself as an alternative to glass, fused silica, or silicon-based fluidic devices. The primary advantages arising from the use of polymers are the diverse fabrication protocols that can be used to produce the desired structures, the extensive array of physiochemical properties associated with different polymeric materials, and the simple and robust modification strategies that can be employed to alter the substrate's surface chemistry. However, while the strengths of polymer microfluidics is currently being realized, the evolution of polymer-based nanofluidics has only recently been reported. In this critical review, the opportunities afforded by polymer-based nanofluidics will be discussed using both elastomeric and thermoplastic materials. In particular, various fabrication modalities will be discussed along with the nanometre size domains that they can achieve for both elastomer and thermoplastic materials. Different polymer substrates that can be used for nanofluidics will be presented along with comparisons to inorganic nanodevices and the consequences of material differences on the fabrication and operation of nanofluidic devices (257 references).

show abstract

Section: Fabrication Of Nanochannels and Nanoslits In Polymersmentioning

confidence: 99%

Flexible fabrication and applications of polymer nanochannels and nanoslits

et al. 2011

View full text Add to dashboard Cite

show abstract

“…La mise en oeuvre de la méthode des ondes planes (PWM, Plan Wave Method) travaillant dans l'espace des vecteurs d'onde k par la technique des différences finies dans le domaine temporel (FDTD, Finite-difference Time-Domain) permet de déterminer les modes dont la propagation est autorisée (39,40). Résumons les principaux résultats (41,42). Pour une bande interdite située autour de 1,55 µm, la valeur de a est de 0,775 µm pour une épaisseur des motifs organiques diffractifs de 1 µm et une épaisseur de substrat supérieure à 1,55 µm.…”

Section: B Les Dispositifs à Bande Interdite Organique (Bipo)unclassified

Vers l'optoélectronique organique bas coût

Moliton

Trigaud

2005

J3eA

View full text Add to dashboard Cite

Résumé -A travers quelques exemples de réalisations de composants d'un réseau local de communications optiques, est dressé un court panel non exhaustif des possibilités offertes par la matière organique dans le secteur des micro et nanotechnologies. Sont passés en revue les avantages et les inconvénients des milieux organiques et des dispositifs résultants, tout en s'attardant sur les spécificités des procédés de la filière organique, notamment dans le cas de la fabrication de diodes électroluminescentes et de dispositifs à bande interdite photonique.

show abstract

“…[1][2][3][4][5] Recently, the need for ion-beam etching of organic materials without damage to the underlying structure has been identified for use in techniques such as in-depth mass analysis or nanoscale fabrication of organic materials such as cells, drugs and polymer devices. However, conventional ion beam irradiation generally induces damage such as carbonization, chemical bond breaking/recombination, and conformational change.…”

Section: Introductionmentioning

confidence: 99%