Microwave enhanced fast anisotropic etching of monocrystalline silicon

Dziuban, Jan

doi:10.1016/s0924-4247(00)00373-3

Cited by 31 publications

(27 citation statements)

References 9 publications

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“…The fact that the non-ionizing radiation (NIR) such as EMF and mechanical vibration could modulate the water molecule dissociation and hydrogen peroxide (H 2 O 2 ) formation in it can be considered as well documented (Klassen 1982;Dziuban 2003;Walczak and Dziuban 2004;Domrachev et al 1996). As the H 2 O 2 is a strong modulator of cell metabolism, it was suggested to be one of the messengers through which the biological effects of NIR are realized.…”

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confidence: 99%

Cell hydration as a universal marker for detection of environmental pollution

Ayrapetyan

2012

Environmentalist

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At present, when the technological progress brings progressive increase in environmental pollutions by different chemical and physical (ionizing and non-ionizing radiations) factors, the detection of the safety of environmental medium from the point of public health is one of the fundamental problems of modern Life Sciences. This problem has especially disquieting character after the Chernobyl and Japan nuclear catastrophes, when the level of background ionizing radiation and chemical pollutions of environmental medium of the number of world's regions are increased beyond safety doses. As the biological effect of weak environmental factors have nonlinear dosedependent character, besides its thermodynamic characteristics it depends also on environmental composition and initial state of organism. Therefore, the current policy of World Health Organization and other international organizations whose mission is to establish safety standards for environmental pollutions by chemical and physical factors, based only on the their concentration or energy absorption rate by organism cannot be considered as adequate. It is suggested that the biological marker having universal sensitivity to different factors and determining the functional state of organisms could be used for estimation of the safety doses of environmental factors on organism. In present review are presented the data consisting of the hypothesis according to which the Na/K pump and Na/Cacontrolling cell hydration could serve as a universal and extra-sensitive cellular marker for detection of hazardous effect of environmental pollutions.

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Cell hydration as a universal marker for detection of environmental pollution

Ayrapetyan

2012

Environmentalist

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“…Previously 183°C, 3.7 MPt, SEM image obtained effective ansiotropic etching of silicon in deionised water [8] showed that x5000. water became very aggressive fluid able to etch silicon (Fig.…”

Section: Etching Of Silicon In Deionised Watermentioning

confidence: 99%

“…shortened 9 times in comparison to standard process from 6 hours to 40 65 TP.IC]minutes (V1009 imImin, 80°C, 7M KOH)(Fig. 4a)[10]. ArduousFig.…”

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Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH

Walczak

Dziuban

2003

Optoelectronic and Electronic Sensors V

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A new microwave enhanced anisotropic wet method of etching of silicon (External Etching Microwave SiliconE2MSi), has been presented. In the method an etchant is irradiated by microwave and then flows to an external reaction chamber where etching is performed. The reaction chamber is situated outside of area of microwave irradiation. The main characteristics of E2Msi etching has been presented. It has been shown that the new process utilizes a memory effect ofhigh chemical reactivity observed in water and water-based solution irradiated by microwave.

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“…redoxsystem or complexants, oxidizing agent, surfactants, and metal impurities) [13][14][15][16][17] are Open Access *Correspondence: prem@iith.ac.in MEMS and Micro/Nano Systems Laboratory, Department of Physics, Indian Institute of Technology Hyderabad, Kandi, Sangareddy, India added into KOH to get high speed etching and the alcohols/surfactants are incorporated to improve the surface morphology [18][19][20][21][22][23][24]. Moreover, etching at the boiling point of the etchant [11,25], microwave irradiation of the etchant [26], ultrasonic agitation of the etchant [27] have been employed to increase the etch rate. The ultrasonic method may rupture the fragile structures and microwave irradiation technique causes irradiation damage to the structures.…”

Section: Introductionmentioning

confidence: 99%

Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

Rao

Swarnalatha

Pal

2017

Micro and Nano Syst Lett

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Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching. In most commonly employed etchants (i.e. TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved anisotropy between Si{111} and Si{110} planes. In the manufacturing company, high etch rate is demanded to increase the productivity that eventually reduces the cost of end product. In order to modify the etching characteristics of KOH for the micromachining of Si{110}, we have investigated the effect of hydroxylamine (NH 2 OH) in 20 wt% KOH solution. The concentration of NH 2 OH is varied from 0 to 20% and the etching is carried out at 75 °C. The etching characteristics which are studied in this work includes the etch rates of Si{110} and silicon dioxide, etched surface morphology, and undercutting at convex corners. The etch rate of Si{110} in 20 wt% KOH + 15% NH 2 OH solution is measured to be four times more than that of pure 20 wt% KOH. Moreover, the addition of NH 2 OH increases the undercutting at convex corners and enhances the etch selectivity between Si and SiO 2 .

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Microwave enhanced fast anisotropic etching of monocrystalline silicon

Cited by 31 publications

References 9 publications

Cell hydration as a universal marker for detection of environmental pollution

Cell hydration as a universal marker for detection of environmental pollution

Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH

Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

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