;'-' _ UNLIMt'H::ilgo_J J microwave (2.45 GHz) discharges produced in an Asmussen resonant cavity. Double Langmuir probes, placed directly in the discharge at the point where the radial electric field is zero, act as a comparison with the analytic diagnostics. Microwave powers ranging from 30 to 100 watts produce helium and nitrogen discharges with pressures ranging from 0.5 to 6 tort. Analysis of the data predicts electron temperatures from 5 to 20 eV, electron densities from 1011 to 3×10 t2 cm-3, and collision frequencies from 109 to 10II sec'l, l I. INTRODUUHON Microwave resonant cavity discharges and electron cyclotron resonance (ECR) discharges have become increasingly useful in industrial processes. The low pressure, low ion energy characteristics of ECR discharges make them promising alternatives to radio frequency coupled devices in the field of plasma processing of materials. Due to the inherent use of microwaves in ECR discharges, ECR designs utilizing microwave resonant cavity discharges are being extensively studied for use in plasma processing and thin film deposition 1. Resonant cavity discharges have many additional applications other than materials processing, such as fluorescent excimer lamp systems2,3 and as a possible laser medium4. Due to the lack of electrodes, resonant cavities are very durable yet simple in design and operation. The availability of inexpensive microwave components at 2.45 GHz is also an attractive feature. Prior to 1970, the electromagnetics of microwave resonant cavities perturbed by discharges have been extensively studied.5-22 An article published in 1946 by 3C. Slater5 extensively details research on microwave electronics completed during World War II at the Massachusetts Institute of Technology. The article details the effects that an arbitrary conductance places on a microwave resonant cavity. The techniques presented by Slater were then applied specifically to plasma discharges. _-g These initial techniques were actually used with repet_,ively pulsed discharges, either formed by the electxomagnetic fields within the cavity or produced externally. In a series of four papers by S.C. Brown and coworkers, 9-12 the Slater technique was extensively detailed, as well as its applications as an electron density and collision frequency