Microwave compatible electromagnetic valve for plasma deposition studies

Abstract

A microwave compatible electromagnetic valve capable of discharging saturated vapors in vacuum for shock wave formation and subsequent pulsed plasma deposition is presented. The valve discharges vapors of 1–5 atm and 75 °C with open duration times of 36–178 μs into vacuum. A theoretical model describing rarefaction wave motion coupled with a valve dynamic model was used to determine critical open duration time required for driving a shock wave in the experimental system. Valve design, operating characteristics, and rarefaction wave dynamics for H2, He, Ar, and CO2 internal to the valve are described.

Thermal instability of electrolytic capacitor bank used for gas puff valve

“…[11][12][13][14][15][16][17][18][19][20][21][22] Closing of the valve is achieved by springs, inlet gas pressure, or mechanical deformation of the diaphragm. In some cases a plenum is used to meter a precise quantity of gas.…”