An ultrafast microwave annealing process has been developed to reduce the defect density in vertically aligned carbon nanotubes (CNTs). Raman and thermogravimetric analyses have shown a distinct defect reduction in the CNTs annealed in microwave for 3 min. Fibers spun from the as-annealed CNTs, in comparison with those from the pristine CNTs, show increases of approximately 35% and approximately 65%, respectively, in tensile strength ( approximately 0.8 GPa) and modulus (approximately 90 GPa) during tensile testing; an approximately 20% improvement in electrical conductivity (approximately 80000 S m(-1)) was also reported. The mechanism of the microwave response of CNTs was discussed.