Microsystems elements based on free-standing thick-films made with a new sacrificial layer process

Lucat, Claude; Ginet, Patrick; Castille, Christophe; Debéda, Hélène; Ménil, Francis

doi:10.1016/j.microrel.2008.03.016

Cited by 30 publications

(25 citation statements)

References 6 publications

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“…To assess the characteristics of this mode, selfactuated resonant microcantilevers based on a PZT piezoelectric thickfilm sandwiched between two gold electrodes have been fabricated using screen-printing technology associated to a sacrificial layer process [27]. The microcantilevers comprising Au/PZT/Au layers [28] were partially released from an alumina substrate (Fig.…”

Section: Case Of Elongation Vibrationsmentioning

confidence: 99%

Effect of hydrodynamic force on microcantilever vibrations: Applications to liquid-phase chemical sensing

Dufour

Lemaire

Caillard

et al. 2014

Sensors and Actuators B: Chemical

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Abstract:At the microscale, cantilever vibrations depend not only on the microstructure's properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever's vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending mode for chemical detection. However, the performance of microcantilevers excited in this standard out-of-plane dynamic mode drastically decreases in viscous liquid media. When immersed in liquids, in order to limit the decrease of both the resonant frequency and the quality factor, and improve sensitivity in sensing applications, alternative vibration modes that primarily shear the fluid (rather than involving motion normal to the fluid/beam interface) have been studied and tested: these include inplane vibration modes (lateral bending mode and elongation mode). For application (2), the classical method to measure the rheological properties of fluids is to use a rheometer. However, such systems require sampling (no insitu measurements) and a relatively large sample volume (a few milliliters). Moreover, the frequency range is limited to low frequencies (less than 200Hz). To overcome the limitations of this classical method, an alternative method based on the use of silicon microcantilevers is presented. The method, which is based on the use of analytical equations for the hydrodynamic force, permits the measurement of the complex shear modulus of viscoelastic fluids over a wide frequency range.

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Section: Case Of Elongation Vibrationsmentioning

confidence: 99%

Effect of hydrodynamic force on microcantilever vibrations: Applications to liquid-phase chemical sensing

Dufour

Lemaire

Caillard

et al. 2014

Sensors and Actuators B: Chemical

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show abstract

“…Using the combination of screen-printing technology and sacrificial layer method, bridges and cantilevers are partially released from an alumina substrate after removal of sacrificial layer to form electroded PZT microsystems [2] (Fig.1, Fig.2 andFig.3). The microceramics are composed of a PZT layer sandwiched between two Au electrodes.…”

Section: Au/pzt/au Thick-film Processingmentioning

confidence: 99%

Piezoelectric properties of various printed PZT microsystems

Debéda

Favre

Lucat

2014

AIP Conference Proceedings

Self Cite

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Abstract. Free-standing PZT thick-films and completely released devices can be interesting for MEMS applications, avoiding the mechanical effect of the substrate on their electromechanical properties. Improvements of the electromechanical properties of free-standing and completely released electroded piezoelectric Au/PZT/Au thick-films with different geometries are studied. They are successfully fabricated thanks to the association of the low-cost screenprinting technology with the sacrificial layer method. Free-standing electroded and completely released PZT thick films appear promising for microsystems applications.

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“…To assess the characteristics of this mode, self-actuated resonant microcantilevers based on a thick-film piezoelectric layer sandwiched between two electrodes have been processed using a sacrificial layer process [25]. The screen-printed microcantilevers comprising Au/PZT/Au layers were partially released from an alumina substrate and tested [26].…”

Section: Case Of Elongation Vibrationsmentioning

confidence: 99%

Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection

et al. 2013

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At the microscale, cantilever vibrations depend not only on the microstructure's properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever's vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending mode for chemical detection. However, the performance of microcantilevers excited in this standard out-of-plane dynamic mode drastically decreases in viscous liquid media. When immersed in liquids, in order to limit the decrease of both the resonant frequency and the quality factor, alternative vibration modes that primarily shear the fluid (rather than involving motion normal to the fluid/beam interface) have been studied and tested: these include inplane vibration modes (lateral bending mode and elongation mode). For application (2), the classical method to measure the rheological properties of fluids is to use a rheometer. To overcome the limitations of this classical method, an alternative method based on the use of silicon microcantilevers is presented. The method, which is based on the use of analytical equations for the hydrodynamic force, permits the measurement of the complex shear modulus of viscoelastic fluids over a wide frequency range.

show abstract

Microsystems elements based on free-standing thick-films made with a new sacrificial layer process

Cited by 30 publications

References 6 publications

Effect of hydrodynamic force on microcantilever vibrations: Applications to liquid-phase chemical sensing

Effect of hydrodynamic force on microcantilever vibrations: Applications to liquid-phase chemical sensing

Piezoelectric properties of various printed PZT microsystems

Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection

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