2019
DOI: 10.1051/photon/20199834
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Microsystèmes intégrés en niobate de lithium

Abstract: Le niobate de lithium (LiNbO3) suscite un vif intérêt en photonique depuis des décennies en raison de ses fortes propriétés électro-optiques et non-linéaires. L’opportunité récente de l’usiner en couches minces a élargi le spectre des applications déjà nombreuses du matériau. Les enjeux actuels concernent la miniaturisation des composants tout en préservant de faibles pertes optiques.

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“…1, waveguides with cross-sectional areas less 1 µm 2 waveguide can be fabricated by electron-beam lithography in thin film lithium niobate, which allows for much stronger light confinement than in waveguides generated by e.g. titanium indiffusion or micromechanical processes [2].…”
mentioning
confidence: 99%
“…1, waveguides with cross-sectional areas less 1 µm 2 waveguide can be fabricated by electron-beam lithography in thin film lithium niobate, which allows for much stronger light confinement than in waveguides generated by e.g. titanium indiffusion or micromechanical processes [2].…”
mentioning
confidence: 99%