Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

Deng, Yang; Yin, Shou-Wei; Hong, Yue; Wang, Yi; Hu, Yi; Zou, Gaopeng; Kuang, Tongchun; Zhou, Kesong

doi:10.1016/j.apsusc.2020.145508

Cited by 18 publications

(3 citation statements)

References 32 publications

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“…1,c). As reported in [19], it is the tops of the columnar grains that cause island-like protrusions. The structure of WN-coating is dense and without pores (see Fig.…”

Section: Resultsmentioning

confidence: 74%

Morphology and Sputtering of Tungsten Nitrides Coatings Exposed to Deuterium Plasma

Tolstolutskaya¹,

Куприн²,

Nikitin³

et al. 2023

Problems of Atomic Science and Technology

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Processes of sputtering, surface modification and change in the stoichiometric composition of W and WN coatings deposited on stainless steel by cathodic arc evaporation were studied under the influence of low-energy (500 eV/D) deuterium plasma with fluence of (1…4.5)1024 D2 +/m2 at room temperature. The composition of the WN coating changes under the influence of deuterium plasma, its enrichment with tungsten up to 100 % is observed. Results of erosion studies indicated that the sputtering yields for coatings WN and W are ~ 2.410-2 at./ion and to be systematically higher than the published data which were measured for bulk materials.

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“…1,c). As reported in [19], it is the tops of the columnar grains that cause island-like protrusions. The structure of WN-coating is dense and without pores (see Fig.…”

Section: Resultsmentioning

confidence: 74%

Morphology and Sputtering of Tungsten Nitrides Coatings Exposed to Deuterium Plasma

Tolstolutskaya¹,

Куприн²,

Nikitin³

et al. 2023

Problems of Atomic Science and Technology

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“…The phase analysis demonstrated that the common for all multilayers WN layer had the fcc NaCl-type W 2 N phase (JCPDF 00-025-1257). According to Deng et al [ 51 ] and Polcar et al [ 24 , 52 ], the single-phase fcc structure in tungsten nitride can be formed at 30 at.% < N < 55 at.%. Therefore, that is in good agreement with the findings of the present study.…”

Section: Resultsmentioning

confidence: 99%

Microstructure, Mechanical and Tribological Properties of Advanced Layered WN/MeN (Me = Zr, Cr, Mo, Nb) Nanocomposite Coatings

et al. 2022

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Due to the increased demands for drilling and cutting tools working at extreme machining conditions, protective coatings are extensively utilized to prolong the tool life and eliminate the need for lubricants. The present work reports on the effect of a second MeN (Me = Zr, Cr, Mo, Nb) layer in WN-based nanocomposite multilayers on microstructure, phase composition, and mechanical and tribological properties. The WN/MoN multilayers have not been studied yet, and cathodic-arc physical vapor deposition (CA-PVD) has been used to fabricate studied coating systems for the first time. Moreover, first-principles calculations were performed to gain more insight into the properties of deposited multilayers. Two types of coating microstructure with different kinds of lattices were observed: (i) face-centered cubic (fcc) on fcc-W2N (WN/CrN and WN/ZrN) and (ii) a combination of hexagonal and fcc on fcc-W2N (WN/MoN and WN/NbN). Among the four studied systems, the WN/NbN had superior properties: the lowest specific wear rate (1.7 × 10−6 mm3/Nm) and high hardness (36 GPa) and plasticity index H/E (0.93). Low surface roughness, high elastic strain to failure, Nb2O5 and WO3 tribofilms forming during sliding, ductile behavior of NbN, and nanocomposite structure contributed to high tribological performance. The results indicated the suitability of WN/NbN as a protective coating operating in challenging conditions.

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“…In this regard, WN film can be considered as one of the best protective coatings. [288] 3.9.1. Surface Properties of WN Films WN films were deposited on Si (100) and AISI 304 SS at varied N 2 flow rates using superimposition of HiPIMS with midfrequency (MF) pulses during the off time of HiPIMS.…”

Section: Experimental Conditionmentioning

confidence: 99%

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Bharani

Sharma

2022

Physica Status Solidi (a)

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Transition metal nitride (TMN) thin films exhibit outstanding physical, chemical, and mechanical properties, making them best suitable for a wide variety of applications. The most commonly used technique to produce metal nitride thin films with specific properties at optimum conditions is magnetron sputtering. Considering this, this review begins with advancements in the sputtering process from basic diode sputtering to the most commonly used pulsed magnetron sputtering. Further, the literature on several TMNs deposited via magnetron sputtering is summarized, referring to several articles that have been published during the last decades. The main emphasis lies on nitride-based thin films' structural, morphological, and mechanical aspects for various applications. In addition, the influence of reactive gas flow rate, substrate temperature, layer thickness, postannealing temperature, substrate bias voltage, protective layers, the sputtering technique adopted, etc. on the quality and performance of the thin films is also focused. The overall review work can be beneficial for the students and researchers in understanding the basic sputtering phenomenon with its advancements, the relationship between deposition parameters and surface properties, and to know the current research trend for exploring several research gaps in the literature.

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Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

Cited by 18 publications

References 32 publications

Morphology and Sputtering of Tungsten Nitrides Coatings Exposed to Deuterium Plasma

Morphology and Sputtering of Tungsten Nitrides Coatings Exposed to Deuterium Plasma

Microstructure, Mechanical and Tribological Properties of Advanced Layered WN/MeN (Me = Zr, Cr, Mo, Nb) Nanocomposite Coatings

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

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