Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker

Shahosseini, Iman; Lefeuvre, Élie; Martincic, Émile; Woytasik, Marion; Moulin, Johan; Megherbi, S.; Ravaud, Romain; Lemarquand, Guy

doi:10.1007/s00542-012-1477-1

Cited by 15 publications

(10 citation statements)

References 15 publications

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“…Compared to materials as monocrystalline silicon, which can be easily machined by Microelectromechanical systems (MEMS) technologies, such polymer materials present undesirable mechanical behavior. Indeed, the existence of many mechanical proper modes of the diaphragm in the audible frequency band degrades the sound quality of the transducer [8]. Another major advantage of MEMS technologies is the high dimensional precision, below one micron, unachievable by conventional technologies.…”

Section: Index Terms-efficiency Electrodynamic Magnet Mems Microsmentioning

confidence: 99%

“…Indeed, the coil resistance was set at 10 Ω to be compatible with the associated amplifier electronic circuit. To meet the objective of 80 dB SPL in 10 cm beginning from 300 Hz, and to supply a piston like motion in the microspeaker bandwidth, the membrane radius was set at 7.5 mm and its mass at 25 mg [8]. Besides, the MEMS fabrication process used for electroplating the copper microcoil imposes dimensional limits on the microcoil thickness and turns inter-space.…”

Section: Radial Magnetic Flux Densitymentioning

confidence: 99%

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Planar Microcoil Optimization of MEMS Electrodynamic Microspeakers

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Section: Index Terms-efficiency Electrodynamic Magnet Mems Microsmentioning

confidence: 99%

Section: Radial Magnetic Flux Densitymentioning

confidence: 99%

Planar Microcoil Optimization of MEMS Electrodynamic Microspeakers

et al. 2013

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“…Thus, taking a plain membrane of 20 lm thick, but with 14 ribs each 300 lm thick and 150 lm wide, i.e., a membrane mass of 24 mg, there are only three modes (as presented in Ref. 8,Fig. 5) in the desired bandwidth, and the drum mode is shifted to 13 kHz.…”

Section: A Membrane Designmentioning

confidence: 99%

High fidelity microelectromechanical system electrodynamic micro-speaker characterization

Sturtzer

Shahosseini²,

Pillonnet

et al. 2013

Journal of Applied Physics

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Articles you may be interested inNovel magnets configuration toward a high performance electrodynamic micro-electro-mechanical-systems microspeaker This paper deals with the heterogeneous characterization of a microelectromechanical system (MEMS) electrodynamic micro-speaker. This MEMS micro-speaker consists of an optimized silicon structure based on a very light but very stiff membrane. The mobile part is suspended using soft suspension beams, also made of silicon, which enable large out-of-plane displacement. The electromagnetic motor is composed of a micro-assembly permanent ring magnet and of a deposit mobile planar coil fixed on the top of the silicon membrane. Previous publications have presented the MEMS as theoretically able to produce high fidelity and high efficiency over a wide bandwidth. The present study intends to validate the electrical, the mechanical, and the acoustic performance improvements. The characterization of the microfabricated micro-speaker showed that the electric impedance is flat over the entire audio bandwidth. Some results validates the performance improvements in terms of audio quality as compared to state of the art of the MEMS microspeakers, such as the high out-of-plane membrane displacement over 6400 lm, the 80 dB SPL sound pressure level at 10 cm, the 2% maximal distortion level, and the useful bandwidth from 335 Hz to cutoff frequency. V C 2013 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4808334] Sturtzer et al.

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“…The miniaturization of these conventional speakers also has a negative impact on the sound quality and reaches some limits due to the employed materials and the fabrication approaches [ 2 ]. For example, the plastic or polymer diaphragms of conventional speakers are too soft to be used as high-quality radiator surfaces [ 3 ]. The simplification of the mechanical suspensions and electromagnetic parts in the miniaturization would lead to reduced bandwidths and increased nonlinearities, thus deteriorating the sound quality [ 2 , 4 ].…”

Section: Introductionmentioning

confidence: 99%

Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker

Cited by 15 publications

References 15 publications

Planar Microcoil Optimization of MEMS Electrodynamic Microspeakers

Planar Microcoil Optimization of MEMS Electrodynamic Microspeakers

High fidelity microelectromechanical system electrodynamic micro-speaker characterization

Review of Recent Development of MEMS Speakers

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