Microstructure of (Ti,Si,Al)N nanocomposite coatings

Effects of annealing temperature on the microstructure and hardness of TiAlSiN hard coatings

“…Their results showed that the influence of the deposition rate, the ratio of ions/atoms, ions bombardment energy and substrate temperature on the formation of the nanocomposite microstructure was significant [14,17]. On the conditions of low deposition rate, high ratio of ions/atoms, high bombardment energy and high substrate temperature, the precipitation of Al and Si atoms from TiN lattice was easier due to relatively high mobility of surface atoms and it resulted in phase segregation of amorphous Si 3 N 4 and crystalline AlN at grain boundary and the formation of nano-crystallites/amorphous composite structure.…”

“…Adding Si into TiN lattice could inhibit grains growth in columnar manners and contributed to the formation of nanocomposite microstructure composed of TiN crystallites in nanometer embedded in amorphous Si 3 N 4 matrix under thermodynamic driven conditions. The properties of TiSiN coatings were considerably improved due to nanocomposite structure such *Corresponding author (email: alexwx@mailst.xjtu.edu.cn) as superhardness (40-105 GPa) and high thermal stability (up to 1000°C) [9-11].Recently multi-components TiAlSiN coatings had been synthesized to achieve better performance than both TiAlN and TiSiN coatings by different approaches such as magnetron sputtering, arc ion plating and other composite technologies [12][13][14][15][16]. The investigations on TiAlSiN hard coatings were focused on the optimization of deposition process and relationships among composition, microstructure and performance of the coatings, but less systematic investigations were carried on structural transformation and performance changes of TiAlSiN coatings during heat treatment from room temperature to high temperature (beyond 1000°C).…”

“…Recently multi-components TiAlSiN coatings had been synthesized to achieve better performance than both TiAlN and TiSiN coatings by different approaches such as magnetron sputtering, arc ion plating and other composite technologies [12][13][14][15][16]. The investigations on TiAlSiN hard coatings were focused on the optimization of deposition process and relationships among composition, microstructure and performance of the coatings, but less systematic investigations were carried on structural transformation and performance changes of TiAlSiN coatings during heat treatment from room temperature to high temperature (beyond 1000°C).…”

Effect of Silicon Content on the Microstructure and Mechanical Properties of TiAlSiN Coatings Prepared by Reactive Magnetron Sputtering

“…When the silicon content increases to 6 at.%, a further increase in hardness may be due to the formation of a better nanocrystal/amorphous structure. This nanocomposite structure (nanocrystal / amorphous structure) can strongly inhibit the movement of dislocations to achieve high hardness [14,[21][22][23][24]. By continuing increase in the silicon content to 8 at.%, although the grain size becomes smaller, the hardness decreased slightly.…”

Cutting Performance of Low Stress Thick TiAlN PVD Coatings during Machining of Compacted Graphite Cast Iron (CGI)

“…TiAlN coating has been commercially used for tools since it shows good performance compared to other coatings in terms of tool life [19]. A number of studies have investigated the effect of coating architecture, thickness, and deposition methods on mechanical properties and cutting performance of PVD coatings [20][21][22][23][24][25]. These studies have shown that the thickness of the PVD coatings is limited by residual stresses caused by the conventional PVD method.…”