Microstructure of (Ba, Sr)TiO3 thin films deposited by physical vapor deposition at 480 °C and its influence on the dielectric properties

Abstract

The orientation and microstructure of (Ba, Sr)TiO3 (BST) deposited via physical vapor deposition at 480 °C was studied using x-ray diffraction, atomic force microscopy, and transmission electron microscopy. Annealing Pt/BST (previously annealed at 400 °C) at 800 °C in O2 results in grain growth, enhancement of the {100} texture and a 20% increase in the dielectric constant. The 400 °C annealed films become more textured in the {100} orientation as film thickness is increased. Finally, it appears that an interfacial capacitance, rather than the “bulk” dielectric constant limits the total capacitance density of the films.

METALLO-ORGANIC DECOMPOSITION SYNTHESIS AND CHARACTERIZATION OF FERROELECTRIC (PB1 −XCAX)TIO3 Thin Films

“…6(a, b). Such effects have been seen in ferroelectric films [30]. Analyzing grain size, film thickness and r.m.s roughness in Fig.…”

MOCVD of Single‐Axis c‐Oriented Strontium Bismuth Titanate Thin Films and Their Electrical Properties

“…tance with respect to the applied electric field is a common feature of c-axis-oriented BLD films irrespective of the m number, and it is quite different from that of the perovskite-structured oxide. [8,17] In fact, capacitance degradation that occurred along with an increase in the applied electric field was reported for thin films of BST and STO [18][19][20][21] as approximately 36 % in the same electric-field range as is shown in Figure 6 for BST film. [16] The dielectric loss was also independent of the applied electric field, as shown in Figure 6.…”

(Invited) New Dielectric Nanomaterials Fabricated from Nanosheet Technique

“…This relationship in perovskite nanosheets is a peculiar feature related to their larger atomic polarizability, and the high-k properties are materials properties inherent to perovskite nanosheets. as well as various perovskite thin films for comparison (13)(14)(15)(16). In the ultrathin region (< , 45 (3) 3-8 (2012) 20 nm), the ε r values of Nb-based perovskite nanosheets are larger than those of the other perovskites.…”