Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering

Zhang, Guojun; Fan, Tianxiang; Wang, Tao; Chen, Hailin

doi:10.1016/j.apsusc.2013.03.021

Cited by 33 publications

(12 citation statements)

References 25 publications

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“…Hardness of γ Mo 2 N nitride coatings, reported in the literature, ranges from 18 GPa for coatings deposited by DC magnetron sputtering [41] to 38 GPa for coatings produced by means of cathodic arc evaporation [42]. Hardness of the produced coatings was within the range of the values reported in most of the literature references [10,13,23,24,41,42]. In some literature, for example [14], you can find hardness values that differ significantly from those obtained in this work.…”

Section: Analysis Of Hardness Young's Modulus and Adhesion To The Substratesupporting

confidence: 60%

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Characteristics of the Structure, Mechanical, and Tribological Properties of a Mo-Mo2N Nanocomposite Coating Deposited on the Ti6Al4V Alloy by Magnetron Sputtering

et al. 2021

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Mo-Mo2N nanocomposite coating was produced by reactive magnetron sputtering of a molybdenum target, in the atmosphere, of Ar and N2 gases. Coating was deposited on Ti6Al4V titanium alloy. Presented are the results of analysis of the XRD crystal structure, microscopic SEM, TEM and AFM analysis, measurements of hardness, Young’s modulus, and adhesion. Coating consisted of α-Mo phase, constituting the matrix, and γ-Mo2N reinforcing phase, which had columnar structure. The size of crystallite phases averaged 20.4 nm for the Mo phase and 14.1 nm for the Mo2N phase. Increasing nitrogen flow rate leads to the fragmentation of the columnar grains and increased hardness from 22.3 GPa to 27.5 GPa. The resulting coating has a low Young’s modulus of 230 GPa to 240 GPa. Measurements of hardness and Young’s modulus were carried out using the nanoindentation method. Friction coefficient and tribological wear of the coatings were determined with a tribometer, using the multi-cycle oscillation method. Among tested coatings, the lowest friction coefficient was 0.3 and wear coefficient was 10 × 10−16 m3/N∙m. In addition, this coating has an average surface roughness of RMS < 2.4 nm, determined using AFM tests, as well as a good adhesion to the substrate. The dominant wear mechanism of the Mo-Mo2N coatings was abrasive wear and wear by oxidation. The Mo-Mo2N coating produced in this work is a prospective material for the elements of machines and devices operating in dry friction conditions.

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Section: Analysis Of Hardness Young's Modulus and Adhesion To The Substratesupporting

confidence: 60%

“…Coating hardness and Young's modulus in Mo-N coatings varies from 22 GPa to 33 GPa [16,20,22,23] and from 260 GPa to 400 GPa [10,[22][23][24], respectively, depending on the process method and parameters. High values of the H/E > 0.1 ratio ensure favorable tribological properties [25].…”

Section: Introductionmentioning

confidence: 99%

Characteristics of the Structure, Mechanical, and Tribological Properties of a Mo-Mo2N Nanocomposite Coating Deposited on the Ti6Al4V Alloy by Magnetron Sputtering

et al. 2021

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“…Aouadi et al synthesized adaptive Mo 2 N/MoS 2 /Ag composite films which showed that the molybdenum oxide phase which formed on the wear track could play a lubricating role during the wear test [8,9]. Molybdenum nitrides and carbides deposited by physical vapor deposition (PVD) possess many unique physical and mechanical properties, such as high hardness, low average friction coefficients, good adherence to steel substrates, and low electrical resistivity [10][11][12][13]. Specifically, Mo 2 N-based films synthesized using PVD were reported to exhibit excellent friction properties at room temperature [4,11,14].…”

Section: Introductionmentioning

confidence: 99%

Tribological Properties of Mo2N Films at Elevated Temperature

Liu

et al. 2019

Coatings

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Mo2N films were synthesized using the reactive magnetron sputtering system in a mixture of argon and nitrogen, and the tribological properties were investigated at different testing temperatures against an Al2O3 counterpart. The relative intensity ratio (RIR) method was used to calculate the weight fraction of the tribo-film (MoO3) on the wear tracks of the films. The results showed that the average friction coefficient first increased from 0.30 at 25 °C to 0.53 at 200 °C, and then decreased to 0.29 at 550 °C, while the wear rate decreased from 2.1 × 10−6 mm3/Nmm at 25 °C to 5.3 × 10−7 mm3/Nmm at 200 °C and then increased to 3.1 × 10−5 mm3/Nmm at 550 °C. The weight fraction of tribo-film was mainly attributed to changes in the average friction coefficient and the wear rate. Besides this, the relative humidity also influenced the tribological properties at 25–200 °C.

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“…Stöber et al, have reported the shift in the peaks (1 1 1) of ␥-Mo 2 N cubic phase at low angle as a function of the nitrogen partial pressure[13]. Gilewicz et al, have deposited Mo 2 N and CrN phase in the cubic face center with similar lattice parameter, 0.4163 nm (Mo 2 N) and 0.4140 nm (CrN) by cathodic arc evaporation, to form the multilayer Mo 2 N/CrN coating with small interlayer stress[7].Zhang et al, reported, the X-ray diffraction result of MoN x /SiN x demonstrated, only Mo 2 N phase of multilayer coatings was composed and the decrease of stress is due of the disappearance of coherent growth in the multilayer[14].…”

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confidence: 99%

Residual stress, mechanical and microstructure properties of multilayer Mo 2 N/CrN coating produced by R.F Magnetron discharge

Bouaouina

Besnard

Abaidia

et al. 2017

Applied Surface Science

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We have investigated the effect of the period thickness of the multilayer Mo 2 N/CrN deposited on Si substrate produced by reactive magnetron sputtering. Mo 2 N presents a face centered cubic structure and CrN an orthorhombic one. The residual stress of the coatings was determined by the measurement of the substrate curvature. The microstructure of the multilayer was investigated from the X-ray diffraction and scanning electron microscopy (cross section images). The residual stresses resulting from the deposition of the different bi-layer thickness were measured and correlated to the structural properties of the coating as well as the nanoindentation analysis of the coating. The stresses are compressive and tensile for the individual Mo 2 N and CrN layer respectively. The result shows that an increase of the multilayer coatings Mo 2 N/CrN thicknesses induce an increase of the hardness and the elastic modulus, in the other hand the tensile stress increases. The shift of the XRD diffraction peak (1 1 1) of Mo 2 N at high angle which means the reduction of the residual stress is in good agreement with the residual stresses measurements.

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Microstructure, mechanical and tribological behavior of MoNx/SiNx multilayer coatings prepared by magnetron sputtering

Cited by 33 publications

References 25 publications

Characteristics of the Structure, Mechanical, and Tribological Properties of a Mo-Mo2N Nanocomposite Coating Deposited on the Ti6Al4V Alloy by Magnetron Sputtering

Characteristics of the Structure, Mechanical, and Tribological Properties of a Mo-Mo2N Nanocomposite Coating Deposited on the Ti6Al4V Alloy by Magnetron Sputtering

Tribological Properties of Mo2N Films at Elevated Temperature

Residual stress, mechanical and microstructure properties of multilayer Mo 2 N/CrN coating produced by R.F Magnetron discharge

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