Microstructure evolution and grain orientation in ITO targets and their effects on the film characteristics

Mei, Fangsheng; Yuan, Tiechui; Li, Ruidi; Qin, Kai; Huang, Jingwei

doi:10.1007/s10854-018-9598-7

Cited by 10 publications

(6 citation statements)

References 36 publications

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“…Based on the film growth theory, whether with or without a (100) preferred orientation, the polycrystalline ITO film contains many grain boundaries [32,33,34,35], as shown in Figure 8a,b. Moreover, the

{boldCH}_{x}^{+}

group diffuses on the ITO grain boundary, as well as into the ITO grain.…”

Section: Resultsmentioning

confidence: 99%

The Diffusion of Low-Energy Methyl Group on ITO Film Surface and Its Impact on Optical-Electrical Properties

Zhao

Guo

et al. 2018

Materials

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Indium tin oxide (ITO) film is one of the ideal candidates for transparent conductive cathode in methylammonium lead halide perovskite solar cells. Thus, the diffusion of methyl group in ITO film is inevitable, which could deteriorate the optical-electrical property of ITO film. In this study, ITO films with and without (100) preferred orientation were bombarded by the low-energy methyl group beam. After the bombardment, the optical-electrical property of ITO film without (100) preferred orientation deteriorated. The bombardment of methyl group had little influence on the optical-electrical property of ITO film with (100) preferred orientation. Finally, combining the crystallographic texture and chemical bond structure analysis, the diffusion mechanism of low-energy methyl group on ITO lattice and grain boundary, as well as the relation between the optical-electrical property and the diffusion of the methyl group, were discussed systematically. With the above results, ITO film with (100) preferred orientation could be an ideal candidate for transparent conductive cathode in methylammonium lead halide perovskite solar cells.

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{boldCH}_{x}^{+}

group diffuses on the ITO grain boundary, as well as into the ITO grain.…”

Section: Resultsmentioning

confidence: 99%

The Diffusion of Low-Energy Methyl Group on ITO Film Surface and Its Impact on Optical-Electrical Properties

Zhao

Guo

et al. 2018

Materials

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“…Thus, TCMs are usually evaluated through a figure-of-merit (FoM), defined as FoM = 188.5/( R s (1/(√ T – 1) ( R s is the sheet resistance and T is the optical transmittance) . The typical FoM values of ITO, AgNWs, ultrathin metal, and metal mesh are 25.5, 121.6, 1095.9, and 1365.9, respectively. − As far as the FoM is concerned, ultrathin metal and metal mesh are better candidates for composing optically transparent metamaterials, compared with ITO and AgNWs.…”

Section: Theoretical Design and Experimental Methodsmentioning

confidence: 99%

Scalable-Manufactured Metamaterials for Simultaneous Visible Transmission, Infrared Reflection, and Microwave Absorption

Chen

Huang

et al. 2022

ACS Appl. Mater. Interfaces

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Scalable manufacturing of metamaterials with multispectral manipulation capabilities remains highly challenging, which was generally circumvented by integrating several single-spectral metamaterials, potentially leading to complex processes, large thicknesses, and limited fabrication size. We experimentally demonstrate a standalone and scalable-manufactured multispectral metamaterial featuring simultaneous visible transmission, infrared reflection, and microwave absorption. The prepared multispectral metamaterial with an area of 255 cm2 exhibits a visible transmittance of 74.5% at wavelengths of 400–700 nm (the highest 80.2% at 510 nm), a thermal emissivity of 0.08 at the infrared (IR) wavelengths of 2.5–20 μm (the lowest 0.03 at 19.5 μm), and a microwave absorptance of 63.4% at frequencies of 8.2–12.4 GHz (the near-perfect 97.4% at 11.5 GHz) on average with a deep-subwavelength thickness of λ/47. The deep-subwavelength multispectral metamaterial consists of a submillimeter-thick polyethylene terephthalate dielectric spacer sandwiched by a patterned ultrathin metal and a metal mesh back-reflector with ultralow sheet resistances. Unlike the conventional optically transparent microwave absorbers made from indium tin oxides, the surface plasmonic modes can be excited within the submillimeter-thick multispectral metamaterial, bringing about the gap plasmon polaritons-induced microwave attenuation, together with the excellent visible transparency and high IR reflection/low IR emissivity. This work may inspire the designs and practical production of standalone multispectral metamaterials and benefit the protection against ubiquitous IR and microwave reconnaissance without impeding visual observation.

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“…Under pure argon, the high-energy Ar + bombardment of ITO target could easily decompose In 2 O 3 into cheap indium oxide (In 2 O 3-x ) and free oxygen. By comparison, target A with low oxygen content more likely formed In 2 O 3-x , thereby producing less free oxygen and favorably forming oxygen vacancies in ITO films [27,28]. In addition, SnO may also grab the oxygen from In 2 O 3 to yield In 2 O 3-x during the oxidation process of SnO 2 .…”

Section: Effect Of Target Oxygen Content On Resistivity Of Ito Filmmentioning

confidence: 99%

Influence of ITO Target on Structural, Optical, and Electrical Properties of Thin Films Deposited by Magnetron Sputtering

Yang¹,

Zhang²,

Xie³

et al. 2023

J. Phys.: Conf. Ser.

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Indium tin oxide (ITO) targets possess good performances, thereby used to produce high-quality ITO films in transparent electrodes of various optoelectronic devices. The performance of the target greatly affects the performances of prepared ITO films. However, effect of the overall performance of ITO targets on ITO films performance is still not fully understood. ITO films were prepared with four targets by magnetron sputtering in the similar condition in this study. Effects of crystal structure, resistivity, and oxygen content of the targets on photoelectric performances of ITO films were all evaluated. Results showed the important effect of target properties on obtained film characteristics. ITO films prepared by low resistivity targets are more evenly distributed on the substrate surface. Meanwhile, oxygen content of obtained ITO films decreased as oxygen content of ITO targets used in sputtering process increased. This also significantly improved the photoelectric performances. ITO thin films deposited using targets with low resistivity and low oxygen content exhibited excellent photoelectric performances. In this experiment, the prepared ITO film illustrated the lowest resistivity of 1.75×10−4 Ω·cm and average transmittance of 90.5%. In sum, these findings provided a certain experimental basis for further improving the performances of ITO films.

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Microstructure evolution and grain orientation in ITO targets and their effects on the film characteristics

Cited by 10 publications

References 36 publications

The Diffusion of Low-Energy Methyl Group on ITO Film Surface and Its Impact on Optical-Electrical Properties

The Diffusion of Low-Energy Methyl Group on ITO Film Surface and Its Impact on Optical-Electrical Properties

Scalable-Manufactured Metamaterials for Simultaneous Visible Transmission, Infrared Reflection, and Microwave Absorption

Influence of ITO Target on Structural, Optical, and Electrical Properties of Thin Films Deposited by Magnetron Sputtering

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