Microstructure and stress evolution of W nanofilms prepared by arc ion plating under different deposition time and substrate bias

Li, Xi; Mu, Zongxin; Song, Xinyu

doi:10.1007/s10853-024-10329-9

J Mater Sci

2024

DOI: 10.1007/s10853-024-10329-9

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Microstructure and stress evolution of W nanofilms prepared by arc ion plating under different deposition time and substrate bias

Xi Li,

Zongxin Mu,

Xinyu Song

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Microstructure and stress evolution of W nanofilms prepared by arc ion plating under different deposition time and substrate bias

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References 64 publications

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