Microstructure and properties of CrN/Si3N4 nano-structured multilayer films

Xu, Jie; Hattori, Koichiro; Seino, Yutaka; Kojima, Isao

doi:10.1016/s0040-6090(02)00483-2

Cited by 43 publications

(18 citation statements)

References 22 publications

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“…They have been successfully applied as surface protection for tribological applications, diffusion barriers in microelectronics, hard wear resistant coatings on cutting tools due to their high hardness, fracture toughness, chemical inertness and thermal stability. [1,2,3,4]. Essentially, the designing of an appropriate microstructure is the key for desired thin film properties.…”

Section: Introductionmentioning

confidence: 99%

Grain boundary driven Plateau–Rayleigh instability in multilayer nanocrystalline thin film: A phase-field study

2017

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Thermal stability of nanocrystalline multilayer thin film is of paramount importance as the applications often involve high temperature. Here we report on the layer instability phenomenon in binary polycrystalline thin film initiating from the grain boundary migrations at higher temperatures using phase-field simulations. Effect of layer thickness, bilayer spacing and the absence of grain boundary are also investigated along with the grain boundary mobility of individual phases on the layer stability. Layer instability in the polycrystalline film is shown to arise from the grain boundary grooving which originates spontaneously from the presence of grain boundaries. Our results show that the growth of the perturbation generated from the differential curvature follows Plateau-Rayleigh instability criterion. Increase in layer thickness, lower bilayer thickness as well as lower grain boundary mobility improve layer stability. Phase-field simulations show similar microstructural evolution as has been observed in our Zirconium (Zr)/Zirconium Nitride (ZrN) system experimentally. Detail analysis performed in this work to understand the mechanisms of layer instability leads us to predict measures which will improve the thermal stability of multilayer nanocrystalline thin film.

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Section: Introductionmentioning

confidence: 99%

Grain boundary driven Plateau–Rayleigh instability in multilayer nanocrystalline thin film: A phase-field study

2017

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“…Critical features of CrN coating include better wear resistance, corrosion resistance, heat resistance, and most importantly, ease of mold release [1][2][3][4][5][6][7][8][9]. When CrN is exposed to high temperatures, a dense and stable Cr 2 O 3 nanolayered film is formed on the surface as a protective layer [10].…”

Section: Introductionmentioning

confidence: 99%

Corrosion behaviors of Cr(N,O)/CrN multi-layered coatings by cathodic arc deposition

Shen

Chang

et al. 2007

Surface and Coatings Technology

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Cr(N,O)/CrN based coatings were produced in the form of double-layered and four-layered structures, by the cathodic arc deposition process. These coatings were deposited onto tool steel substrates. The phase structure and morphology of coatings were observed by utilizing XRD, XPS and SEM. The corrosion behavior of these coatings was investigated using polarization tests, carried out in the solution of 1 M H 2 SO 4 solution. The SEM surface topography showed a smoother surface of the four-layered Cr(N,O)/CrN coating compared to that of CrN and Cr(N,O)/CrN double-layered coatings. The corrosion resistance of Cr(N,O)/CrN four-layered coatings with thinner thickness was better than that of CrN singlelayered and Cr(N,O)/CrN double-layered coatings, since pinholes in the coatings were effectively blocked by multi-layered structure.

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“…3a). It should be attributed to the finite dislocation movement between and within layers [38,39]. The high H/E and H 3 /E 2 ratios indicate high resistance to plastic deformation.…”

Section: Structural and Mechanical Properties Analysis For Filmmentioning

confidence: 99%

Enhancement in the tribological properties of Cr/DLC multilayers in methane: structural transformation induced by sliding

et al. 2019

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Diamond-like carbon (DLC) films respond as a lubricating material under some atmosphere conditions, such as N 2 , moisture. Nevertheless, incomplete knowledge about the key factors, which control the performances of film under distinct gases, limits the further use of them. Herein, the tribological properties of DLC film and Cr/DLC multilayers with different modulation periods were studied under methane. Frictional tests conducted under methane show that Cr/ DLC film exhibits a great reduction in friction and wear compared to that of DLC film. An interpretation for tribological performances of films was proposed by considering repassivation and structural transformation taking place at the sliding interface. It is chemical passivation that plays a major role in the tribological properties of DLC film, while the Cr/ DLC multilayers possess the lower friction coefficient because of the structural transformation induced by shearing. This study is important for broadening applications of DLC film in the industrial field and reducing energy waste.

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Microstructure and properties of CrN/Si3N4 nano-structured multilayer films

Cited by 43 publications

References 22 publications

Grain boundary driven Plateau–Rayleigh instability in multilayer nanocrystalline thin film: A phase-field study

Grain boundary driven Plateau–Rayleigh instability in multilayer nanocrystalline thin film: A phase-field study

Corrosion behaviors of Cr(N,O)/CrN multi-layered coatings by cathodic arc deposition

Enhancement in the tribological properties of Cr/DLC multilayers in methane: structural transformation induced by sliding

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