Microstructure and hydrogen gas sensitivity of amorphous (Ba,Sr)TiO3 thin film sensors

Zhu, Weiguang; Tan, Ooi Kiang; Yan, Qingyu; Oh, Joo Tien

doi:10.1016/s0925-4005(99)00402-5

Cited by 45 publications

(37 citation statements)

References 16 publications

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“…Barium strontium titanate (Ba 1-x Sr x TiO 3 , hereafter referred to as BST) thin films have been intensively investigated for applications in high density dynamic random access memories [1], IR detection [2], tunable microwave devices [3], and also for the sensing of humidity [4,5] and gas [6]. The material is very attractive for engineers because of its high dielectric constant, low dielectric loss, good thermal stability, and good high frequency characteristics.…”

Section: Introductionmentioning

confidence: 99%

Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures

Mackeviciute¹,

Bagdzevičius²,

Ivanov³

et al. 2016

Lith. J. Phys.

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Thin epitaxial films have a great potential to be used in real life applications, such as oxide-on-silicon. However, they often contain a large amount of defects, leading to an enhanced electrical conductivity. This could be desirable in some applications (i. e. memristors), but the mechanism is not fully understood. Here we report on the investigation of epitaxial barium strontium titanate thin films deposited on strontium titanate single crystal substrates (Ba 0.7 Sr 0.3 TiO 3 /SrRuO 3 //SrTiO 3 heterostructures) with a controlled epitaxial strain. The impedance analysis allowed us to propose a model, which explains changes in the temperature dependence of the conductivity based on the strain-dependent anisotropic change of electron/hole mobility.

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Section: Introductionmentioning

confidence: 99%

Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures

Mackeviciute¹,

Bagdzevičius²,

Ivanov³

et al. 2016

Lith. J. Phys.

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“…So, over a last decade, the pervoskite oxide ceramic such as BaTiO 3 [1-4] and (Ba,Sr)TiO 3 [5][6][7][8][9] have created and promoted interest in chemical sensors. Modifications in microstructure, processing parameters and also concentration of acceptor/donor dopant can vary the temperature coefficient of the resistance and conductivity of ABO 3 oxides.…”

Section: Introductionmentioning

confidence: 99%

Gas sensing performance of barium strontium titanate thick film resistors

Jain

Patil²

2007

J. Phys.: Conf. Ser.

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Abstract. Barium Strontium Titanate (BST-(Ba 0.87 Sr 0.13 )TiO 3 ) ceramic powder was prepared by mechanochemical process. The thick films of different thicknesses of BST were prepared by screen-printing technique and gas-sensing performance of these films was tested for various gases. The films showed highest response and selectivity to ammonia gas. The effect of film thickness on gas response was also studied. The gas response, selectivity, response and recovery time of the sensor were measured and presented.Keywords. (Ba 0.87 Sr 0.13 )TiO 3 thick films, ammonia gas sensor, gas response, selectivity. IntroductionThe pervoskite oxides (ABO 3 ) were used as gas sensor materials for their stability in thermal and chemical atmospheres. So, over a last decade, the pervoskite oxide ceramic such as BaTiO 3 [1-4] and (Ba,Sr)TiO 3 [5][6][7][8][9] have created and promoted interest in chemical sensors. Modifications in microstructure, processing parameters and also concentration of acceptor/donor dopant can vary the temperature coefficient of the resistance and conductivity of ABO 3 oxides. Sensors based on ABO 3 -type complex oxide material, of rare earth elements have an outstanding merit of its high sensitive and selective characteristics. These characteristics can be controlled by selecting suitable A and B atoms or chemically doping A′ and B′ elements equivalent respectively to A and B into ABO 3 to obtain A x A′ 1-

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“…In recent years Ba x Sr 1−x TiO 3 (BST) thin films have received intensive research interest for their device applications, such as bolometers [1][2][3], gas sensor [4,5], tunable microwave filters [6] and radio-frequency microelectromechanical (RF-MEMS) capacitive switches [7]. For most of the cases, higher dielectric constant of BST makes it possible to achieve smaller size or better performance of the devices.…”

Section: Introductionmentioning

confidence: 99%

Structure and electrical properties of Ba0.67 Sr0.33TiO3 thin film fabricated by sol-gel based composite technique

Sun

Tan

et al. 2006

J Electroceram

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A sol-gel based novel technique is used to fabricate Ba 0.67 Sr 0.33 TiO 3 (BST) thin films with thickness up to several microns. In this technique, surface-modified fine BST particles are dispersed in a sol-gel precursor solution. The pH value of the precursor solution is modified to achieve high zeta potential for the dispersed powder, hence a very stable and uniform slurry can be produced. The slurry is then spincoated onto Pt/Ti/SiO 2 /Si substrate, pre-heated and annealed as in conventional sol-gel process. The resulting films show well-developed dense polycrystalline structure with uniform grain distribution. The metal-BST-metal structure of the films displays good dielectric properties.

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Microstructure and hydrogen gas sensitivity of amorphous (Ba,Sr)TiO3 thin film sensors

Cited by 45 publications

References 16 publications

Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures

Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures

Gas sensing performance of barium strontium titanate thick film resistors

Structure and electrical properties of Ba0.67 Sr0.33TiO3 thin film fabricated by sol-gel based composite technique

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Microstructure and hydrogen gas sensitivity of amorphous (Ba,Sr)TiO3 thin film sensors

Cited by 45 publications

References 16 publications

Strain engineering of electrical conductivity in epitaxial thin Ba0.7Sr0.3TiO3 film heterostructures

Strain engineering of electrical conductivity in epitaxial thin Ba0.7Sr0.3TiO3 film heterostructures

Gas sensing performance of barium strontium titanate thick film resistors

Structure and electrical properties of Ba0.67 Sr0.33TiO3 thin film fabricated by sol-gel based composite technique

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Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures

Strain engineering of electrical conductivity in epitaxial thin Ba_0.7Sr_0.3TiO₃ film heterostructures