Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

Zou, Yuanshu; Wang, Xiaofeng; Wang, Langping

doi:10.1016/j.diamond.2023.110573

Diamond and Related Materials

2024

DOI: 10.1016/j.diamond.2023.110573

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Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

Yuanshu Zou,

Xiaofeng Wang,

Langping Wang

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Microstructure and high-temperature tribological properties of Ti/Si co-doped diamond-like carbon films fabricated by twin-targets reactive HiPIMS

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