Microstructure analysis of β‐FeSi₂ grown on Ag‐coated Si(001) substrate

Abstract

Microstructure of epitaxial β‐FeSi2 crystalline film grown on Ag‐coated Si (001) substrate was investigated with scanning electron microscope (SEM) and transmission electron microscopes (TEMs). It was found that the film consists of two types of β‐FeSi2 grains, or rod‐like polygonal and thin platelet grains. The platelet grains are connected mutually to form large continuous‐film areas on the Si(001) substrate. The crystallographic orientation relationship obtained is: β‐FeSi2(100)[011]//Si(001)[110], which is a rare epitaxial relationship. However, the interface between the platelet grains and the Si substrate is very flat at an atomic level. Moreover, remains of Ag impurities are not detected in the β‐FeSi2 grains. These results indicate that the continuous crystalline film consisting of high quality β‐FeSi2 crystals can be produced by using Ag‐coated Si(001) substrate. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Luminescent iron disilicide film growth by metal–organic chemical vapor deposition

“…Therefore, it was found that the interface was very flat at an atomic level. These results correspond to the report on the (100)-oriented epitaxial β-FeSi 2 film on Ag-coated Si(100) substrates by Motomura et al 26) The STEM-EDS elemental analysis was carried out in and around the β-FeSi 2 films, and remaining Ag was not detected. The result suggests that the coated Ag element diffused rapidly in the depth part of the Si substrate.…”

Photoluminescent iron disilicide on modified Si surface by using silver

“…together with the Fe Kα-mapping [Fig.4(b)] and Ag Lαmapping [Fig.4(c)] obtained with EDX attached to STEM. Motomura et al investigated the microstructure of this β-FeSi 2 film on this modified-Si substrate with electron microscope analysis and reported that the film was comprised of rod-like polygonal grains that had platelet grains with a flat surface 14). The β-FeSi 2 =Si interface of the platelet grains was flat and sharp, as shown in Fig.4(a).…”