Microstructural, mechanical, thermal stability and oxidation behavior of TiSiN/CrV N multilayer coatings deposited by D.C. reactive magnetron sputtering

Athmani, M.; AL-Rjoub, A.; Cavaleiro, D.; Chala, Abdelouahad; Cavaleiro, A.; Fernandes, Filipe

doi:10.1016/j.surfcoat.2020.126593

Cited by 16 publications

(8 citation statements)

References 42 publications

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“…Moreover, Si contents above 10 at. % exhibit very broad diffraction peaks that are associated with the low crystallinity degree [18,28]. Based on the results of WDS analysis, the Si concentration in the monolithic TiSiN coatings and WN x /TiSiN multilayer is 8.1 at.…”

Section: Cross-sectionsmentioning

confidence: 99%

“…The difference between lattice parameters of two individual layers (according to the ICSD database, for a W and a TiN is 3.159 nm and 4.244 nm, respectively) contributes to the broadening of the XRD diffraction peaks. In addition, the presence of a gradient interface between the individual layers in the multilayer design contributes to the diffraction peaks broadening as well [18].…”

Section: Cross-sectionsmentioning

confidence: 99%

“…% to 8.4 at. % [18]. Wan et al utilized cathodic arc ion plating for deposition of TiSiN multilayers with various MeN second layers, namely TiN, ZrN, NbAlN, CrN, and MoN.…”

Section: Introductionmentioning

confidence: 99%

“…%, respectively. The Si 3 N 4 phase has not been detected by XRD due to its amorphous character[7,8,10,18,20]. It could be concluded that the WN x /TiSiN multilayer revealed the same crystal structure presented in the monolithic coatings, namely body-centered cubic W (ICSD 98-065-3433) and face-centered cubic TiN (ICSD 98-064-4770) phases.…”

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confidence: 96%

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The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

Sahul

Bočáková

Smyrnova

et al. 2022

J. Phys.: Conf. Ser.

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The present work deals with the comparison of selected properties of WNx/TiSiN multilayer and respective WNx and TiSiN monolithic coatings that were deposited at the same parameters. The effect of the multilayer architecture on the structure and mechanical properties of WNx/TiSiN multilayer was studied in detail. The multilayers and monolayers were fabricated on high-speed steel substrates by unbalanced direct magnetron sputtering from W (purity 99.95 %) and Ti80Si20 (purity 99.50 %) targets. The chemical composition and the cross-sectional morphology of multilayer and single-layer coatings were characterized by scanning electron microscopy (SEM) equipped with wave-dispersive X-ray spectroscopy (WDS). The structure was analyzed by X-ray diffraction (XRD). The hardness and Young’s modulus of multilayer and coatings were investigated using the nanoindentation method. Results showed that the WNx/TiSiN multilayer, possessing cubic W and TiN phases and a dense layered microstructure, showed slightly improved hardness (28.5 ± 3.5 GPa) and HIT/EIT parameter (0.087), as compared with the WNx and TiSiN coatings. It has been shown that the design of multilayered structure of WNx/TiSiN coating is a promising way to tailor the microstructure and properties of the hard coatings.

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Section: Cross-sectionsmentioning

confidence: 99%

Section: Cross-sectionsmentioning

confidence: 99%

“…% to 8.4 at. % [18]. Wan et al utilized cathodic arc ion plating for deposition of TiSiN multilayers with various MeN second layers, namely TiN, ZrN, NbAlN, CrN, and MoN.…”

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 96%

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The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

Sahul

Bočáková

Smyrnova

et al. 2022

J. Phys.: Conf. Ser.

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“…Transition metal nitrides-based thin films have been widely used for improving the hardness and wear resistance properties [39][40][41][42][43][44][45]. Moreover, they also provide enhanced corrosion and oxidation resistance properties even at high temperatures [46][47][48]. Chromium (Cr), Titanium (Ti), tungsten (W) based binary and ternary alloy and multilayer thin films have shown enhanced hardness of around ∼25-35 GPa whereas they have also reflected good oxidation resistance properties up to ∼500 °C-600 °C [49,50].…”

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confidence: 99%

A review of mechanical and tribological properties of Ni₃Al-based coatings-synthesis and high-temperature behavior

Tiwari,

Rao,

Kharb

et al. 2023

Phys. Scr.

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Ni-based superalloys and thin films have drawn the attention of researchers because of their extraordinary properties. In particular, Nickel Aluminides like Ni3Al thin films show excellent mechanical and tribological properties. They are good candidates for high-temperature applications as they show excellent corrosion and oxidation resistance properties. Several researchers have synthesized Ni3Al thin films via Chemical vapor deposition methods (CVD) and physical vapor deposition methods (PVD). Most of them have synthesized Ni3Al thin film via magnetron sputtering because of microstructural homogeneity and less contamination achieved by this process. To achieve better properties of these films, many alterations in terms of deposition parameters and doping have been experimented by researchers. This work reflects the review of work done in the area of depositing Ni3Al-based thin films via different techniques for high-temperature applications.

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The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

Tiwari,

Rao,

Kharb

et al. 2024

Surface & Interface Analysis

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Chromium‐based coatings have been of interest to researchers for the last two decades because of their extraordinary properties like high hardness, high wear, and corrosion resistance properties. However, it is in practice and research to increase the properties of Cr‐based coatings for high‐temperature applications. Numerous dopants like silicon (Si), titanium (Ti), vanadium (V), aluminum (Al), and zirconium (Zr) have been used together with Cr to achieve enhanced properties. The plasma‐based sputtering process is one of the popular and reliable techniques to deposit thin film coatings. The substrate material, processed gas and pressure, substrate temperature, film thickness, and so on also play a significant role in varying the properties and microstructure of the deposited film. Several researchers have deposited Cr/CrN‐based thin films via the chemical vapor deposition technique (CVD) and physical vapor deposition technique (PVD) to study their properties and behavior at room temperature as well as for high‐temperature applications. This work reflects the review of work done to deposit Cr/CrN‐based coatings deposited via PVD: more specifically sputtering technique. The effect of doping in the CrN matrix and variation in sputtering parameters on the properties of CrN‐based coatings have also been studied.

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Microstructural, mechanical, thermal stability and oxidation behavior of TiSiN/CrV N multilayer coatings deposited by D.C. reactive magnetron sputtering

Cited by 16 publications

References 42 publications

The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

A review of mechanical and tribological properties of Ni₃Al-based coatings-synthesis and high-temperature behavior

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

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Microstructural, mechanical, thermal stability and oxidation behavior of TiSiN/CrV N multilayer coatings deposited by D.C. reactive magnetron sputtering

Cited by 16 publications

References 42 publications

The influence of multilayer architecture on the structure and mechanical properties of WNx/TiSiN coatings in comparison with WNx and TiSiN single layers

The influence of multilayer architecture on the structure and mechanical properties of WNx/TiSiN coatings in comparison with WNx and TiSiN single layers

A review of mechanical and tribological properties of Ni3Al-based coatings-synthesis and high-temperature behavior

The effect of sputtering parameters and doping on the properties of CrN‐based coatings—A critical review

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The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

The influence of multilayer architecture on the structure and mechanical properties of WN_x/TiSiN coatings in comparison with WN_x and TiSiN single layers

A review of mechanical and tribological properties of Ni₃Al-based coatings-synthesis and high-temperature behavior