1991
DOI: 10.1557/proc-243-451
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Microstructural Evolution of Sol-Gel Derived PZT Thin Films

Abstract: Transmission electron microscopy (TEM) was used to investigate the microstructural evolution of sol-gel derived ferroelectric PZT films. Aggregates of perovskite crystals nucleated and grew out of a pyrochlore matrix at 550°C. A dense, single-phase perovskite PZT film was obtained by fast firing the film at 650°C for 30 minutes. The grain size of this film was approximately 0.2-0.4 μm. Hot-stage TEM observed disappearance of ferroelectric domains as the temperature approaching 325°C.

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Cited by 5 publications
(3 citation statements)
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“…The first challenge in structural development is to form the desired perovskite crystal structure and eliminate the metastable pyrochlore (or fluorite [38]) form. On heating, pyrochlore forms at a lower temperature than does perovskite [39][40][41] and is a common alternative form for many perovskite ferroelectrics, particularly relaxor ferroelectrics. Because this pyrochlore is non-ferroelectric and has a low dielectric constant, both the ferroelectric and dielectric constant are degraded by its presence [40].…”
Section: Thin-film Processing Structural Evolution and Propertiesmentioning
confidence: 99%
See 1 more Smart Citation
“…The first challenge in structural development is to form the desired perovskite crystal structure and eliminate the metastable pyrochlore (or fluorite [38]) form. On heating, pyrochlore forms at a lower temperature than does perovskite [39][40][41] and is a common alternative form for many perovskite ferroelectrics, particularly relaxor ferroelectrics. Because this pyrochlore is non-ferroelectric and has a low dielectric constant, both the ferroelectric and dielectric constant are degraded by its presence [40].…”
Section: Thin-film Processing Structural Evolution and Propertiesmentioning
confidence: 99%
“…Because this pyrochlore is non-ferroelectric and has a low dielectric constant, both the ferroelectric and dielectric constant are degraded by its presence [40]. For PZT, pyrochlore will transform into perovskite when the film is heated to higher temperatures [39][40][41][42]. In many cases, pyrochlore is found preferentially at the surface and goes undetected in X-ray diffraction.…”
Section: Thin-film Processing Structural Evolution and Propertiesmentioning
confidence: 99%
“…The first challenge in structural development is to form the desired perovskite crystal structure and eliminate the metastable pyrochlore (or fluorite [38]) form. On heating, pyrochlore forms at a lower temperature than does perovskite [39][40][41] and is a common alternative form for many perovskite ferroelectrics, particularly relaxor ferroelectrics. Because this pyrochlore is non-ferroelectric and has a low dielectric constant, both the ferroelectric and dielectric constant are degraded by its presence [40].…”
Section: Thin-film Processing Structural Evolution and Propertiesmentioning
confidence: 99%