“…Our earlier studies found out that Yb and Al concentrations correlate with individual layers. [13][14][15][16] The concentration of Al increased in the zone from 30 to 100% of total thickness of the oxidation affected zone compared to the bulk, whereas Yb concentration was lower there with the exception of large precipitates of Yb 4 Al 2 O 9 . Sucking Yb and Al onto the surface resulted in a formation of the first, thin, porous subsurface layer composed from almost pure silicon nitride.…”