Microstructural and mechanical investigations of tungsten carbide films deposited by reactive RF sputtering

Abdelouahdi, K.; Sant, C.; Legrand-Buscema, C.; Aubert, P.; Perrière, J.; Renou, Gilles; Houdy, Ph.

doi:10.1016/j.surfcoat.2005.11.015

Cited by 37 publications

(23 citation statements)

References 23 publications

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“…On the other hand, it has a low friction coefficient. The WC coating can be deposited on the substrate material by magnetron sputtering, including a direct current magnetron sputtering (DC MS) technique [3][4][5][6][7][8][9][10][11][12][13] and a radio frequency magnetron sputtering (RF MS) technique [14][15][16][17][18][19][20][21][22][23][24]. Moreover, WC coatings can be deposited with a low-pressure and low-temperature plasma system, where tungsten carbonyl is used as a precursor [25][26][27][28][29] and it enables the temperature to decrease near to 300 °C [19].…”

Section: Introductionmentioning

confidence: 99%

Microstructure and Mechanical Properties of Annealed Wc/C Coatings Deposited With Different Gas Mixtures in an RFMS Process

Horňák¹

2019

Ceramics - Silikaty

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The optimised indented hardness (H IT ) of WC/C coatings deposited using an RF magnetron sputtering technique in relation to the vacuum chamber pressure and bias is presented in this paper. Based on the investigation, the maximal values of hardness (ca. 22.3 GPa) and Young's modulus (ca. 298 GPa) are shown. Besides the hardness and Young's modulus values, the minimal value of the coefficient of friction (COF) ca. 0.29 was obtained. WC/C coatings were deposited with and without N 2 and N 2 + SiH 4 (in a gas mixture) and they were subsequently annealed at 200 °C, 500 °C and 800 °C. Finally, they were evaluated from the aspect of H IT , E IT , COF and morphology as well as from the structural composition of the WC/C coatings before and after annealing.

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Section: Introductionmentioning

confidence: 99%

Microstructure and Mechanical Properties of Annealed Wc/C Coatings Deposited With Different Gas Mixtures in an RFMS Process

Horňák¹

2019

Ceramics - Silikaty

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“…It is these characteristics of WC which improve the other properties of materials [13]. WC layers have been deposited using chemical vapor deposition (CVD) [14][15][16][17][18][19][20][21][22] and physical vapor deposition (PVD) techniques [1][2][3][4][5][6][7][8][9][10][11][12][13][23][24][25][26][27][28][29][30][31]. Plasma enhanced CVD of tungsten hexacarbonyl has also been used for the deposition of WC/C layers at lower temperatures compared to those used in CVD techniques [15][16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

“…WC creates β-W 2 C [7,24] and β-WC 1-x [7,24,29] phases where the individual forms of C and WC have different indentation of hardness (H), indentation modulus (E) and COF. Various factors which influence the formation of both phases are as follows: the deposited substrate surface temperature [3,8,11,12,23]; applied pressure and bias voltage [4,24,27,28]; content of carbon in the layers [1,6,8,23]; the flow rate and composition of the precursor [3,4,6,29], and residual stress in the layers [26]. Monocrystalline Si substrate is used to test structural properties under laboratory conditions [27][28][29][30].…”

Section: Introductionmentioning

confidence: 99%

THE EFFECT OF PRESSURE, BIAS VOLTAGE AND ANNEALING TEMPERATURE ON N₂ AND N₂+SiH₄ DOPED WC/C DC MAGNETRON SPUTTERED LAYERS

Horňák¹

2018

Ceramics - Silikaty

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“…[23][24][25][26][27][28] The present study is of interest both for fundamental reasons and for technological applications. This nanostructured system material has been rather investigated previously, either in the form of nanocomposite or multilayer, for the improvement of the tribological performance and hardness.…”

Section: Introductionmentioning

confidence: 99%

WC/a-C nanocomposite thin films: Optical and electrical properties

Abad

Sánchez-López

Cusnir

et al. 2009

Journal of Applied Physics

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Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering WC/amorphous carbon ͑a-C͒ thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray photoelectron spectroscopy and grazing angle x-ray diffraction measurements, the WC/a-C films are composite materials made of hexagonal W 2 C and/or cubic ␤-WC 1−X nanocrystallites embedded in ͑a-C͒ matrix. The optical properties were studied by spectroscopic ellipsometry and the electrical resistivity was measured by the van der Pauw method between 20 and 300 K. Both the optical and the electrical properties of the WC/a-C films are correlated with the chemical composition and microstructure evolution caused by a-C addition. The optical properties of W 2 C / a-C and ␤-WC 1−x / a-C films with a-C content Յ10 at. % are explained by modeling their dielectric functions by a set of Drude-Lorentz oscillators. Further increase in a-C content leads only to the formation of ␤-WC 1−x / a-C nanocomposite structures and their optical properties progressively evolve to those of a-C single phase. The electrical resistivity as a function of the temperature of all the films exhibits a negative temperature coefficient of resistivity. Theoretical fitting using the grain-boundary scattering model shows that the transport properties are mainly limited by the grain size and electron mean free path parameters.

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Microstructural and mechanical investigations of tungsten carbide films deposited by reactive RF sputtering

Cited by 37 publications

References 23 publications

Microstructure and Mechanical Properties of Annealed Wc/C Coatings Deposited With Different Gas Mixtures in an RFMS Process

Microstructure and Mechanical Properties of Annealed Wc/C Coatings Deposited With Different Gas Mixtures in an RFMS Process

THE EFFECT OF PRESSURE, BIAS VOLTAGE AND ANNEALING TEMPERATURE ON N₂ AND N₂+SiH₄ DOPED WC/C DC MAGNETRON SPUTTERED LAYERS

WC/a-C nanocomposite thin films: Optical and electrical properties

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