2020
DOI: 10.1007/978-3-030-10662-1
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Microscale Flow and Heat Transfer

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Cited by 27 publications
(47 citation statements)
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“…Next, using (28)- (30) and Table 6 in "Appendix A," we can write up to nonlinear quadratic order ψ = ψ(ρ, θ, r j , R jk , g j , G jk , A (1) jk , θ, θ, j ), (40)…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Next, using (28)- (30) and Table 6 in "Appendix A," we can write up to nonlinear quadratic order ψ = ψ(ρ, θ, r j , R jk , g j , G jk , A (1) jk , θ, θ, j ), (40)…”
Section: Resultsmentioning
confidence: 99%
“…ν (9) β (4) − β (5) ,θ − (ρ β (6) ) ,ρ /ρ ν (1) −ν ν (12) −β (9) ν (2) −β (1) ,θ ν (13) −β (7) ,θ ν (3) −β (1) ν (14) −β…”
Section: Resultsmentioning
confidence: 99%
“…The effect of ridges therefore cannot be neglected especially in rarefied gas flows. Most of the analytical, experimental and computational work deals with randomly distributed rough micro-structures, micro-cavities, textured, furrowed or wavy microchannels, but work on structured micro-ridges protruding outward from the channel wall surface is minimal [1]. In the current numerical investigation, it is found that the influence of ridges and rarefaction on Poiseuille number (fRe where f is friction factor and Re is Reynolds number) on gas flow in microchannels is vigorously coupled.…”
Section: Introductionmentioning
confidence: 83%
“…The Knudsen number is defined as the ratio Kn ≡ λ f ree /L c , with L c the characteristic length of the flow problem at hand. Situations with Kn > 10 are said to be in the molecular flow regime, a situation commonly encountered in MEMS devices even at moderate vacuum levels because of the typically small characteristic lengths [10]. In the molecular flow regime, interactions between gas molecules can be neglected.…”
Section: Damping Contributionsmentioning
confidence: 99%
“…All relevant surface areas of the MEMS accelerometer for calculating the damping contributions are listed in Table 1. Using these parameters together with the estimates for τ obtained through Monte-Carlo simulation, the total expected gas damping as a function of pressure can be calculated through Equations ( 4) and (10). The relative contributions of both kinetic damping and squeezed-film damping from distinct regions in the accelerometer are listed in Table 2, as well as the corresponding damping coefficient at a reference pressure of 0.1 mbar.…”
Section: Pressure Dependence Of the Quality Factormentioning
confidence: 99%