Microsacle PolySilicon Hemispherical Shell Resonating Gyroscopes with Integrated Three-dimensional Curved Electrodes

Zhuang, Xuye; Chen, Binggen; Wang, Xinlong; Yu, Lei; Wang, Fan; Guo, Shuwen

doi:10.1088/1742-6596/986/1/012022

Cited by 6 publications

(9 citation statements)

References 4 publications

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“…Wan et al [ 143 , 144 ] and Zhuang et al [ 145 , 146 ] used polysilicon to fabricate a micro- HRG using the same method as Bernstein et al [ 134 , 135 ]. The advantages of this method include elimination of the extra assembly process due to simultaneous fabrication of the shell and resonator, a simple fabrication method, and a large transduction area with a small and uniform gap size due to anchorage of the shell at the center with uniform circumferential electrodes.…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

“…The advantages of this method include elimination of the extra assembly process due to simultaneous fabrication of the shell and resonator, a simple fabrication method, and a large transduction area with a small and uniform gap size due to anchorage of the shell at the center with uniform circumferential electrodes. The performance of the resonator as a gyro in force-rebalance mode showed a frequency mismatch of 0.51 Hz, and a bias stability of 21.8 deg./h [ 144 ], while Zhuang et al [ 145 ] reported performance of an HRG in open-loop mode with a resonance frequency of 28 kHz, a frequency mismatch of 0.009%, and a bias stability of 80 deg./h.…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

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Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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show abstract

“…According to the working principle of resonators, accurate measurement of the resonance frequency of micro resonators is crucial [11]. The main methods for measuring the resonance frequency of micro resonators are electrical measurement and measurement based on laser Doppler vibrometer (LDV) [12][13][14]. Electrical measurement requires that the resonator has conductivity.…”

Section: Introductionmentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

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Micro-electro mechanical system resonant gyroscope plays a more and more important role in inertial navigation. As a core sensing component of micro resonant gyroscope, fused silica micro hemispherical resonator (FS-MHR) is widely concerned because of its great performance potential. The resonance frequency is one of the important characteristic parameters of micro resonators, and laser vibration measurement technology is often used for high-precision measurement of this parameter. During the measurement process, it is inevitably affected by the interference of some light sources. To explore how light affects the resonance characteristics of FS-MHR, this paper establishes a relevant theoretical model; and verifies and analyzes the influence of the photothermal effect on the resonance characteristics of FS-MHR through simulation and experiment. Revealed the trend of temperature and resonance frequency changes over time under the same lighting conditions for uncoated and metal-coated films. The measured data shows that the resonance frequency of FS-MHR coated with the metal film is more susceptible to the influence of the photothermal effect. After 60 s of illumination, the resonance frequency will increase by 6.13 Hz, and frequency splitting will also cause a deviation fluctuation of 2.35 Hz under continuous illumination. This will introduce certain errors in the measurement results, and corresponding measures need to be taken to avoid interference from the light source.

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“…One is via chemical vapor deposition (CVD) on the hemispherical cavity, the other is via a blowing process. As for the CVD approach, a 3D micro-hemispherical shell structure could be fabricated by depositions of polysilicon [ 9 ], diamond [ 10 ], and silicon oxide [ 4 ] on isotropically etched cavities, or poly-crystalline diamond [ 11 ] on a micro-electro-discharge machining cavity. The gap between the shell and electrode is usually determined by the thickness of the sacrifice layer, which can be precisely controlled.…”

Section: Introductionmentioning

confidence: 99%

Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

et al. 2021

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A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications.

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Microsacle PolySilicon Hemispherical Shell Resonating Gyroscopes with Integrated Three-dimensional Curved Electrodes

Cited by 6 publications

References 4 publications

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

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