1990
DOI: 10.1016/0924-4247(90)85036-4
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Micropump and sample-injector for integrated chemical analyzing systems

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Cited by 133 publications
(41 citation statements)
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“…Peristaltic pumps using glass as a diaphragm material as well as this study reported by Shoji et al [43] and Smits et al [44] require large diaphragm diameter (centimeter order) due to small deformability of normal thickness glass. This fact makes the system large and f sp small.…”
Section: Performance Comparison With Other Micropumps On Chipmentioning
confidence: 96%
“…Peristaltic pumps using glass as a diaphragm material as well as this study reported by Shoji et al [43] and Smits et al [44] require large diaphragm diameter (centimeter order) due to small deformability of normal thickness glass. This fact makes the system large and f sp small.…”
Section: Performance Comparison With Other Micropumps On Chipmentioning
confidence: 96%
“…The use of piezoelectric stacks to actuate a micropump has previously been demonstrated by Shoji et al [3]. In this implementation, micropumps capable of non-pulsatile liquid flow and controllable flow rates were integrated on a silicon wafer for use in chemical analyzing systems.…”
Section: Pump Actuator Designmentioning
confidence: 99%
“…A variety of intriguing microcomponents have been developed to control the movement of fluids, including elements based on acoustic, centrifugal and electromagnetic forces; electroosmotic and electrophoretic effects; micromechanical and pneumatically powered components; and vapor bubbles [1][2][3][4][5][6][7][8][9][10][11][12][13]. One of the most promising approaches to developing microfluidics components is the use of printing and molding techniques applied to soft polymeric materials, particularly poly(dimethylsiloxane) (PDMS) [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…Since then research in this area has undergone an enormous growth and many different microfluidic devices has been developed, which include valves, pumps, flowsensors, and fluidic mixers as well as chemical and biological sensors [5]. Resent work is mostly focused on integrating several devices on a single substrate, the eventual aim being development of an on-chip chemical analysis system [5,6].…”
Section: Chapter II Literature Surveymentioning
confidence: 99%