Micromould based laser shock embossing of thin metal sheets for MEMS applications

Liu, Huixia; Shen, Zongbao; Wang, Xiao; Wang, Hejun; Tao, Maoke

doi:10.1016/j.apsusc.2010.02.073

Cited by 61 publications

(18 citation statements)

References 10 publications

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“…We started by specifying the desired transition trajectory for the prewelding phase first [see (1)]. Based on the preliminary work, the following exponential trajectory was chosen as the desired trajectory…”

Section: A High-speed Tracking In Prewelding Phasementioning

confidence: 99%

Control of a Magnetostrictive-Actuator-Based Micromachining System for Optimal High-Speed Microforming Process

Wang

Witthauer

Zou

et al. 2015

IEEE/ASME Trans. Mechatron.

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In this paper, the process control of a magnetostrictive-actuator-based microforming system is studied. Microforming has recently become an emerging advanced manufacturing technique for fabricating miniaturized products for applications including medical devices and microelectronics. Particularly, miniaturized desktop microforming systems based on unconventional actuators possess great potential in both high productivity and low cost. Process control of these miniaturized microforming systems, however, is challenging and still at its early stage. The challenge arises from the complicated behaviors of the actuators employed, the switching and the transition involved in the actuation/motion, and the uncertainty of the system dynamics during the entire microforming process. The dynamics and the hysteresis effects of the magnetostrictive actuator can be excited, resulting in positioning errors of the workpiece during both the trajectory tracking and the output transition phases. The rapid tracking-transition switching is also accompanied with substantial variation of the system dynamics. Moreover, the process control is further complicated by the use of multistage actuators and the augmentation of ultrasonic vibrations to the microforming process. In this paper, a control framework integrating iterative learning control and an optimal transition trajectory design along with feedforward-feedback control is proposed to achieve highspeed, high-quality microforming. The efficacy of the proposed control approach is demonstrated through experiments.Index Terms-Iterative learning control, magnetostrictive actuator, microforming, optimal output tracking transition.

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Section: A High-speed Tracking In Prewelding Phasementioning

confidence: 99%

Control of a Magnetostrictive-Actuator-Based Micromachining System for Optimal High-Speed Microforming Process

Wang

Witthauer

Zou

et al. 2015

IEEE/ASME Trans. Mechatron.

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“…The applications of laser-shock-induced deformation on thin metal sheets have been drawing increasing attention [4][5][6][7][8][9][10]. Laser shock microforming can be achieved with or without a micro-mold [5,11].…”

Section: Introductionmentioning

confidence: 99%

Rubber-induced uniform laser shock wave pressure for thin metal sheets microforming

Shen

Wang

Liu

et al. 2015

Applied Surface Science

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“…They also investigated the effects of laser fluence and laser pulse number on the heights of the replicated structures. Liu et al [18] successfully fabricated circularity microchannels on a metallic foil surface using laser shock embossing technology. They studied the laser shock embossing process through simulation and experiments.…”

Section: Introductionmentioning

confidence: 99%

Experimental and Numerical Investigations of a Novel Laser Impact Liquid Flexible Microforming Process

Liu

Jiang

et al. 2018

Metals

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A novel high strain rate microforming technique, laser impact liquid flexible embossing (LILFE), which uses laser induced shock waves as an energy source, and liquid as a force transmission medium, is proposed by this paper in order to emboss three-dimensional large area micro arrays on metallic foils and to overcome some of the defects of laser direct shock microembossing technology. The influences of laser energy and workpiece thickness on the deformation characteristics of the pure copper foils with the LILFE process were investigated through experiments and numerical simulation. A finite element model was built to further understand the typical stages of deformation, and the results of the numerical simulation are consistent with those achieved from the experiments. The experimental and simulation results show that the forming accuracy and depth of the embossed parts increases with the increase in laser energy and decrease in workpiece thickness. The thickness thinning rate of the embossed parts increases with the decrease of the workpiece thickness, and the severest thickness thinning occurs at the bar corner region. The experimental results also show that the LILFE process can protect the workpiece surface from being ablated and damaged, and can ensure the surface quality of the formed parts. Besides, the numerical simulation studies reveal the plastic strain distribution of embossed microfeatures under different laser energy.

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Micromould based laser shock embossing of thin metal sheets for MEMS applications

Cited by 61 publications

References 10 publications

Control of a Magnetostrictive-Actuator-Based Micromachining System for Optimal High-Speed Microforming Process

Control of a Magnetostrictive-Actuator-Based Micromachining System for Optimal High-Speed Microforming Process

Rubber-induced uniform laser shock wave pressure for thin metal sheets microforming

Experimental and Numerical Investigations of a Novel Laser Impact Liquid Flexible Microforming Process

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