Micromilling of metal alloys with focused ion beam–fabricated tools

Adams, David P.; Vasile, M. J.; Benavides, Gilbert L.; Campbell, A. N.

doi:10.1016/s0141-6359(00)00064-7

Cited by 113 publications

(45 citation statements)

References 13 publications

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“…Due to the tool manufacturing process, the suppliers were only able to promise a radius tolerance of ± 10µm. Because of Sandia National Laboratories' expertise areas of optical engineering and Focused Ion Beam (FIB) machining [3][4][5], it was determined that tool modification was not only possible, but would prove to be a valuable addition to the Laboratory's capabilities.…”

Section: Diamond Tool Modification By Focused Ion Beam Machiningmentioning

confidence: 99%

Design and manufacturing of complex optics: the dragonfly eye optic.

Claudet¹,

Sweatt²,

Hodges³

et al. 2006

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The "Design and Manufacturing of Complex Optics" LDRD sought to develop new advanced methods for the design and manufacturing of very complex optical systems. The project team developed methods for including manufacturability into optical designs and also researched extensions of manufacturing techniques to meet the challenging needs of aspherical, 3D, multi-level lenslet arrays on non-planar surfaces. In order to confirm the applicability of the developed techniques, the team chose the Dragonfly Eye optic as a testbed. This optic has arrays of aspherical micro-lenslets on both the exterior and the interior of a 4mm diameter hemispherical shell. Manufacturing of the dragonfly eye required new methods of plunge milling aspherical optics and the development of a method to create the milling tools using focused ion beam milling. The team showed the ability to create aspherical concave milling tools which will have great significance to the optical industry. A prototype dragonfly eye exterior was created during the research, and the methods of including manufacturability in the optical design process were shown to be successful as well.3 4

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Section: Diamond Tool Modification By Focused Ion Beam Machiningmentioning

confidence: 99%

Design and manufacturing of complex optics: the dragonfly eye optic.

Claudet¹,

Sweatt²,

Hodges³

et al. 2006

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show abstract

“…9 Milling tests involve constant table feed rates of 3, 10, 25 and 50 mm/minute, and again a tool is rotated clockwise (looking down on the workpiece) so that sharp facet edges cut. A rotation speed of 18,000 rpm is used for each test, and the axial depth per pass is equal to 1.0 µm.…”

Section: Machining At Feed Rates Of 3-50 Mm/minutementioning

confidence: 99%

Meso-Machining Capabilities

Benavides¹,

Adams²,

Yang³

2001

Self Cite

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Meso-scale manufacturing processes are bridging the gap between silicon-based MEMS processes and conventional miniature machining. These processes can fabricate two and three-dimensional parts having micron size features in traditional materials such as stainless steels, rare earth magnets, ceramics, and glass. Meso-scale processes that are currently available include, focused ion beam sputtering, micro-milling, micro-turning, excimer laser ablation, femtosecond laser ablation, and micro electro discharge machining. These meso-scale processes employ subtractive machining technologies (i.e., material removal), unlike LIGA, which is an additive meso-scale process. Meso-scale processes have different material capabilities and machining performance specifications. Machining performance specifications of interest include minimum feature size, feature tolerance, feature location accuracy, surface finish, and material removal rate. Sandia National Laboratories is developing meso-scale mechanical components and actuators which require meso-scale parts fabricated in a variety of materials. Subtractive meso-scale manufacturing processes expand the functionality of meso-scale components and complement silicon based MEMS and LIGA technologies.ii

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“…There has recently been a great deal of interest in the development of cutting tools and processes for micro-scale and meso-scale mechanical machining [1][2][3][4][5][6], but there has been relatively little documentation on the practicalities encountered in transforming these laboratory capabilities into production efforts to machine and assemble meso-scale engineered parts. This paper discusses some of the problems encountered and lessons learned regarding machining, fixturing, assembly, and bonding of this meso-scale artifact.…”

Section: Introductionmentioning

confidence: 99%

Machining, Assembly, and Characterization of a Mesoscale Double Shell Target

Bono

Hibbard

2004

Journal of Manufacturing Processes

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Several issues related to the manufacture of precision meso-scale assemblies have been identified as part of an effort to fabricate an assembly consisting of machined polymer hemispherical shells and machined aerogel. The assembly, a double shell laser target, is composed of concentric spherical layers that were machined on a lathe and then assembled. This production effort revealed several meso-scale manufacturing techniques that worked well, such as the machining of aerogel with cutting tools to form low density structures, and the development of an assembly manipulator that allows control of the assembly forces to within a few milliNewtons. Limitations on the use of vacuum chucks for meso-scale components were also identified. Many of the lessons learned in this effort are not specific to double shell targets and may be relevant to the production of other meso-scale devices.

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Micromilling of metal alloys with focused ion beam–fabricated tools

Abstract: AbstrackThis work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating microstructure in metals and alloys. Specifically, -25pm diameter micro-end mills are made from cobalt Introduction:

Cited by 113 publications

References 13 publications

Design and manufacturing of complex optics: the dragonfly eye optic.

Design and manufacturing of complex optics: the dragonfly eye optic.

Meso-Machining Capabilities

Machining, Assembly, and Characterization of a Mesoscale Double Shell Target

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