Micromechanical silicon instrument and systems development at Draper Laboratory

Barbour, N.; Connelly, J.; Gilmore, Jerold P.; Greiff, Paul; Kourepenis, A.; Weinberg, Marc S.

doi:10.2514/6.1996-3709

Cited by 12 publications

(6 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…There are two main trends in gyro development [1][2][3][4][5], the first is to achieve high accuracy for inertial navigation (e.g. missile, vehicle…), and the second is miniaturisation and integration for low volume applications (e.g.…”

Section: Introductionmentioning

confidence: 99%

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

et al. 2007

View full text Add to dashboard Cite

This paper presents a Coriolis Vibrating Gyro made of a strong piezoelectric material and designed at ONERA (The French Aerospace Lab). For many years ONERA has been developing inertial piezoelectric microsensors for vehicle attitude control and navigation (accelerometers and gyros). Despite its weak piezoelectric coefficients, quartz is used today because of its excellent mechanical and thermal properties. Gyro). It is a monolithic CVG with a tuning fork as the sensitive element. The exciting and detecting electronics of this sensor are presented as well. It has been theoretically demonstrated, that one way to enhance CVG (Coriolis Vibrating Gyro) resolution, is the use of a material with higher piezoelectric coefficient such as PZT ceramic. Thus the design and fabrication of a PZT gyro have been undertaken. The PZT gyro that has been developed during this work is called PZT VIG (Vibrating IntegratedFirst results concerning the sensor scale factor and resolution are presented and discussions are led about the comparison with theoretical expectations.

show abstract

Section: Introductionmentioning

confidence: 99%

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

et al. 2007

View full text Add to dashboard Cite

show abstract

“…[3], [4], [5]. Figure 5 and 7, are data recently acquired on later generation sensor and electronics and represent the architecture BNA is currently implementing in the automotive yaw rate sensor pilot production.…”

Section: Automotive Applications Specific Resultsmentioning

confidence: 99%

“…Draper has made great strides in simplifying the device fabrication process and realizing fate sensors of increasingly higher performance {2, 3,4,5].…”

Section: Introductionmentioning

confidence: 99%

Performance of small, low cost rate sensors for military and commercial applications

Kourepenis

Borenstein

Connelly

et al. 1997

Guidance, Navigation, and Control Conference

Self Cite

View full text Add to dashboard Cite

Draper Laboratory and Boeing North American have formed an alliance to develop small, low cost rate sensors for commercial and military applications. Advanced silicon micromachining techniques produce sensors of high performance, ruggedness, and inherent symmetry. When integrated with Applications Specific Integrated Circuits (ASIC's), the rate sensor will fit in a 3 cm per side flat pack and operate from a single 5 Vdc supply.Gyroscopes are fabricated using a dissolved wafer process that features single crystal silicon anodicajly bonded to a glass substrate, resulting in a sensor die size of approximately 1 mm. Uncompensated bias and scale factor performance of 0.5 °/s and 1.0% are nominally demonstrated over the automotive temperature range of -40 °C to +85 °C. Bias stability over smaller temperature ranges of 0.5 °C has surpassed 10 °/hr (0.003 7s) in overnight (6 hour) tests. Nominal resolution is 150 ° /hr in a 60 Hz bandwidth, yielding an angle random walk of 0.25 °/Vh. Best to date resolution and angle random walk performance is 25°/ hr in 60 Hz and 0.04 %/h respectively. The robustness of the design with regards to environment has been demonstrated in the ability to survive air guns tests in excess of 60,000 g's.This paper discusses the principle of operation, fabrication techniques, measured and projected performance, with a principal focus on recent tuning fork gyro (TFG) test results.Associated electronics, controls, and applications issues will also be addressed.

show abstract

“…The gyro is made from an etched silicon piece anodically bonded to a glass substrate [6,7]. The glass carries the electrostatic driving and capacitive pickoff plates; the silicon piece attaches at the anchor points, leaving most of the silicon to float.…”

Section: The Micromachined Silicon Tuning Fork Gyromentioning

confidence: 99%

Vibrating Gyroscopes

Lawrence¹

1998

Mechanical Engineering Series

View full text Add to dashboard Cite

Micromechanical silicon instrument and systems development at Draper Laboratory

Cited by 12 publications

References 0 publications

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

A Coriolis Vibrating Gyro Made of a Strong Piezoelectric Material

Performance of small, low cost rate sensors for military and commercial applications

Vibrating Gyroscopes

Contact Info

Product

Resources

About