Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

Makihara, Mitsuhiro; Satô, Norio; Shimokawa, Fusao; Nishida, Yasuhide

doi:10.1109/50.737415

Cited by 50 publications

(20 citation statements)

References 5 publications

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“…Makihara et al (1999) devised a photonic switch based on this method of thermocapillary propulsion. Light propagating through a waveguide is deflected by the presence of a gas bubble or oil plug in a liquid-filled channel, which is actuated by thermocapillary pumping.…”

Section: Propulsion By Capillary Pressure Gradientsmentioning

confidence: 99%

Principles of Microfluidic Actuation by Modulation of Surface Stresses

Darhuber

Troian

2005

Annu. Rev. Fluid Mech.

435

340

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Development and optimization of multifunctional devices for fluidic manipulation of films, drops, and bubbles require detailed understanding of interfacial phenomena and microhydrodynamic flows. Systems are distinguished by a large surface to volume ratio and flow at small Reynolds, capillary, and Bond numbers are strongly influenced by boundary effects and therefore amenable to control by a variety of surface treatments and surface forces. We review the principles underlying common techniques for actuation of droplets and films on homogeneous, chemically patterned, and topologically textured surfaces by modulation of normal or shear stresses.

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Section: Propulsion By Capillary Pressure Gradientsmentioning

confidence: 99%

Principles of Microfluidic Actuation by Modulation of Surface Stresses

Darhuber

Troian

2005

Annu. Rev. Fluid Mech.

435

340

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“…Such precise and fast etch systems enable real optical hybridization at high yield and low manufacturing costs. Some examples include inserting filters into trenches to make low-cost wavelength-division-multiplexing modules [4] and using micromechanical optical switches integrated into the waveguide substrate that exploit thermocapillary action in very narrow trenches [5]. Additionally, with advanced etch technology capable of making tightly controlled deep narrow trenches, a new generation of compact low-index-contrast waveguide devices becomes practically realizable [6].…”

mentioning

confidence: 99%

Trenches for Building Blocks of Advanced Planar Components

2004

IEEE Photon. Technol. Lett.

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Abstract-Trenches are fundamental structures used to build advanced optical planar waveguide components. In this letter, the fabrication of trenches across silica-on-silicon waveguides using inductively coupled plasma etching is presented. These trenches were etched deep into the silicon substrate and their widths were varied between 24 and 100 m. The insertion loss for waveguides with 24-and 28-m-wide trenches etched across them were measured for trenches filled with air and oil. The measured results followed those expected from simulations.

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“…Large branch angles, however, can be realized by using a matching oil or bubble. [3][4][5] A key part of the bubble-type optical switch is the bubble movement control, which is often achieved by an inconvenient process of temperature change.…”

mentioning

confidence: 99%

Integrated liquid crystal optical switch based on total internal reflection

Zhang

Chan

Demokan

et al. 2005

Applied Physics Letters

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An optical switch structure which combines a planar lightwave circuit and liquid crystal is proposed and experimentally demonstrated. The switching is realized by inducing total internal reflection through controlling the refractive index of the liquid crystal. The principle and the design of the integrated optical switch are described. Experimental results suggest that anchoring of the liquid crystal molecules on nonplanar structures is very crucial in affecting the switching performance.

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Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

Cited by 50 publications

References 5 publications

Principles of Microfluidic Actuation by Modulation of Surface Stresses

Principles of Microfluidic Actuation by Modulation of Surface Stresses

Trenches for Building Blocks of Advanced Planar Components

Integrated liquid crystal optical switch based on total internal reflection

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