Micromechanical High-doses Radiation Sensor with Bossed Membrane and Interferometry Optical Read-out

Augustyniak, I.; Knapkiewicz, Paweł; Sareło, K.; Dziuban, Jan; Debourg, Émilie; Pons, Patrick; Olszacki, M.

doi:10.1016/j.proeng.2014.11.372

Cited by 4 publications

(3 citation statements)

References 5 publications

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“…A novel optical readout method is proposed (figure 7) [12]. The idea assumes a silicon membrane with tens of square holes (later invoked as a silicon screen) located above the moving membrane-part of the MEMS high-dose radiation sensor.…”

Section: Remote Optical Detection Methodsmentioning

confidence: 99%

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High-dose radiation sensor with wireless optical detection

Knapkiewicz¹,

Augustyniak²,

Sareło³

et al. 2017

Meas. Sci. Technol.

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We present a miniature silicon–glass MEMS sensor for measurement of high doses of ionizing radiation (above 10 kGy) using a novel wireless optical detection method. The radiation sensor is a miniaturized version of the so-called hydrogen dosimeter. An amount of high-density polyethylene, located inside the MEMS sensor, degrades under ionizing radiation, releasing gaseous hydrogen. The increasing pressure deflects the thin silicon membrane. The sensor’s destructive and proportional modes of work are also proposed. In the destructive mode, sensors provide in situ information on excessive and discrete levels of radiation. The optical detection method is based on an optical head consisting of a moving membrane and a silicon screen with a matrix of micro-holes. Laser light is reflected from the membrane and scattered when the membrane is deflected, in the process illuminating the holes on the silicon screen. The number of illuminated holes is a function of the degree of membrane deflection; the transformation of the holes to the deflection allows for the calculation of pressure and eventually the dose of ionizing radiation.

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Section: Remote Optical Detection Methodsmentioning

confidence: 99%

“…Independently, the pressure inside the MEMS structures as a function of radiation dose was investigated (figure 4(b)). The methodology of the dose/pressure characterization can be found elsewhere [6,12].…”

Section: Mems High-dose Radiation Sensormentioning

confidence: 99%

High-dose radiation sensor with wireless optical detection

Knapkiewicz¹,

Augustyniak²,

Sareło³

et al. 2017

Meas. Sci. Technol.

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“…The optical detection unit was designed for a high radiation silicon sensor, thus the planar dimensions of membrane 1 are the same as in this sensor, i.e. 5 × 5 mm 2 [10]. To choose the proper thickness of the membrane, a computer modeling of its mechanical properties was conducted in ANSYS simulation software.…”

Section: Modeling Of Constructionmentioning

confidence: 99%

Optical detection system for MEMS-type pressure sensor

Sareło

Górecka-Drzazga

Dziuban

2015

J. Micromech. Microeng.

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In this paper a special optical detection system designed for a MEMS-type (micro-electro-mechanical system) silicon pressure sensor is presented. The main part of the optical system—a detection unit with a perforated membrane—is bonded to the silicon sensor, and placed in a measuring system. An external light source illuminates the membrane of the pressure sensor. Owing to the light reflected from the deflected membrane sensor, the optical pattern consisting of light points is visible, and pressure can be estimated. The optical detection unit (20 × 20 × 20.4 mm3) is fabricated using microengineering techniques. Its dimensions are adjusted to the dimensions of the pressure sensor (5 × 5 mm2 silicon membrane). Preliminary tests of the optical detection unit integrated with the silicon pressure sensor are carried out. For the membrane sensor from 15 to 60 µm thick, a repeatable detection of the differential pressure in the range of 0 to 280 kPa is achieved. The presented optical microsystem is especially suitable for the pressure measurements in a high radiation environment.

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