Micromechanical display uses interferometric modulation

Bains, Sunny

doi:10.1117/2.6200007.0004

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“…Several optical MEMS based display technologies have been proposed such as DLP [1,2], GLV [3], IMod [4], Gyricon [5], among others. Most of these technologies are based on reflective optics.…”

Section: Introductionmentioning

confidence: 99%

Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

Wang

Böhringer

Sinclair

et al.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (

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This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive microoptical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150µm×150µm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47µm×160µm size can achieve a maximum static lateral displacement of 10µm at 38V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6kHz.

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Section: Introductionmentioning

confidence: 99%