Micromechanical devices with embedded electro-thermal-compliant actuation

Moulton, Timothy; Ananthasuresh, G. K.

doi:10.1016/s0924-4247(00)00563-x

Cited by 116 publications

(55 citation statements)

References 15 publications

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“…The most recent development was by Eder et al 18 , where they placed an STM tip on either side of a freestanding graphene film and demonstrated tunable membrane deformations using electrostatic control . As far as thermally induced mechanical movement in real devices is concerned, thermal actuation of a microelectromechanical device (that is, silicon-on-insulator technology) was first introduced because thermal loads provide a significantly larger force as compared with electrostatic actuation 19 . Heating under the STM tip has been studied experimentally and a giant enhancement in electronic tunnelling at higher energies due to an intrinsic phonon-mediated inelastic channel was found to be responsible for an unexpected gap-like feature in the graphene tunnelling spectrum 20 .…”

mentioning

confidence: 99%

Thermal mirror buckling in freestanding graphene locally controlled by scanning tunnelling microscopy

Neek-Amal

Schoelz

et al. 2014

Nat Commun

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Knowledge of and control over the curvature of ripples in freestanding graphene are desirable for fabricating and designing flexible electronic devices, and recent progress in these pursuits has been achieved using several advanced techniques such as scanning tunnelling microscopy. The electrostatic forces induced through a bias voltage (or gate voltage) were used to manipulate the interaction of freestanding graphene with a tip (substrate). Such forces can cause large movements and sudden changes in curvature through mirror buckling. Here we explore an alternative mechanism, thermal load, to control the curvature of graphene. We demonstrate thermal mirror buckling of graphene by scanning tunnelling microscopy and large-scale molecular dynamic simulations. The negative thermal expansion coefficient of graphene is an essential ingredient in explaining the observed effects. This new control mechanism represents a fundamental advance in understanding the influence of temperature gradients on the dynamics of freestanding graphene and future applications with electro-thermal-mechanical nanodevices.

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mentioning

confidence: 99%

Thermal mirror buckling in freestanding graphene locally controlled by scanning tunnelling microscopy

Neek-Amal

Schoelz

et al. 2014

Nat Commun

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“…L is length of the driving beam and k is the thermal conductivity coefficient. For Biot numbers of much less than unity, it is reasonable to assume a uniform temperature distribution across the solid at any time, representing a small temperature gradient in it (Moulton and Ananthasuresh 2001). Therefore, the TEMA is decomposed into three line shape micro-beams; two thin driving beams and one thick beam attached to a flexure.…”

Section: Thermal Analysismentioning

confidence: 99%

Precision positioning using a novel six axes compliant nano-manipulator

Akbari

Pirbodaghi

2016

Microsyst Technol

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and nano-imprint lithography (Dash et al. 2015;Hosseini et al. 2016;Sitti and Hashimoto 2000). For instance, in optoelectronic devices, a fiber-to-fiber coupling system is used to couple light from one fiber to another or a laser diode requires to be aligned precisely in at least 5 axes. The conventional passive systems currently used for this purpose are lacking the required precision to align fibers and optical modules (Rubio-Sierra et al. 2005). Traditional positioners containing spherical/revolute joints can only be applied for microscale positioning because of the reduced precision caused by friction or wear in the joints. Moreover, clearance in the traditional joints exceeds the workspace of a nano-positioner (Sutherland et al. 1995;Chen et al. 2003;Trease et al. 2005). Compliant mechanisms based on flexure hinges offer an alternative promising route to achieve nanoscale positioning. They rely on deflection of some or all of their parts to achieve motion and hence, offer many advantages, such as reduction in number of parts, diminished friction and wear, and the need for assembly. Furthermore, the monolithic structure of the flexurehinged mechanisms facilitates their miniaturization and fabrication in the micro scale by the standard microfabrication processes (Yao et al. 2007;Lai et al. 2005;Chen and Culpepper 2006). However, an elaborate design is required to tackle the complexity of motion of several flexible parts. In this paper, a novel 6 axes nano manipulator using a distinct design of flexure hinges to achieve both in-plane and out of plane positioning is designed. Thermo-electro-mechanical actuator capable of applying force in transverse and longitudinal directions is integrated to achieve six degree of freedom positioning. The performance of the compliant positioner is investigated using finite element method (FEM). AbstractIn this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators' arrangements. The compliant mechanism is actuated by thermo-electromechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nanomanipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods.

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“…Many of the micro-machined electromechanical parts (MEMS) have heating elements (e.g., AFM cantilever with heated tip, heatuaters) [68,69]. Thermometry (temperature measurement) of these parts is critical to ensuring their functionality.…”

Section: Thermometry Of Micro-machined Componentsmentioning

confidence: 99%

Metrology, Inspection, and Process Control in Micro‐Scales

Karhade

2011

Micro‐Manufacturing

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Micromechanical devices with embedded electro-thermal-compliant actuation

Cited by 116 publications

References 15 publications

Thermal mirror buckling in freestanding graphene locally controlled by scanning tunnelling microscopy

Thermal mirror buckling in freestanding graphene locally controlled by scanning tunnelling microscopy

Precision positioning using a novel six axes compliant nano-manipulator

Metrology, Inspection, and Process Control in Micro‐Scales

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