2021
DOI: 10.4028/www.scientific.net/kem.903.177
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Micromechanical and Tribological Properties of Nanostructured Carbonitride Coatings Deposited by PVD Technique

Abstract: Nanostructured smart coatings (NSC) based on the TiAlSi-CN composite structure elements were deposited using reactive high-power physical vapor deposition (PVD) technique. The advanced modular deposition system included up to 8 high-power magnetron sputtering devices (MSD) allowing operate them simultaneously and exceed power density of 120 W/cm2 within each device erosion zone. The novel designed NSC on bearing steel 100Cr6 substrates demonstrated enhanced mechanical and tribological properties comparably wit… Show more

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“…The NSC samples were deposited onto bearing steel disk-shaped substrates (∅30 × 4 mm) made of 100Cr6 using the HiPIPMS technique. The HiPIPMS was implemented on the Thin Film Modular Deposition System (TF-MDS) [33,34]. The TF-MDS had four cross-configured workstations equipped with magnetron sputtering devices (MSD), up to 8 MSDs altogether (Figure 1).…”
Section: Preparation Of the Samplesmentioning
confidence: 99%
“…The NSC samples were deposited onto bearing steel disk-shaped substrates (∅30 × 4 mm) made of 100Cr6 using the HiPIPMS technique. The HiPIPMS was implemented on the Thin Film Modular Deposition System (TF-MDS) [33,34]. The TF-MDS had four cross-configured workstations equipped with magnetron sputtering devices (MSD), up to 8 MSDs altogether (Figure 1).…”
Section: Preparation Of the Samplesmentioning
confidence: 99%