Micromachining of polydimethylsiloxane using EUV light

Fukami, Shintaron; Torii, Shuki; Makimura, Tetsuya; Okazaki, Ken; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, K.

doi:10.1109/cleopr.2013.6600551

2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) 2013

DOI: 10.1109/cleopr.2013.6600551

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Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami

Shuki Torii

Tetsuya Makimura

et al.

Abstract: We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

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Micromachining of polydimethylsiloxane using EUV light

Abstract: We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

Cited by 0 publications

References 4 publications

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